-
1
-
-
0000615126
-
Electromagnetic Linear Actuators with Inductive Position Sensing
-
H. Guckel, T. Earles, J. Klein, J.D. Zook, T. Ohnstein, 'Electromagnetic Linear Actuators with Inductive Position Sensing', Sensors and Actuators, A53 (1996) 386-391
-
(1996)
Sensors and Actuators
, vol.A53
, pp. 386-391
-
-
Guckel, H.1
Earles, T.2
Klein, J.3
Zook, J.D.4
Ohnstein, T.5
-
2
-
-
0026224258
-
Fabrication and Testing of the Planar Magnetic Micromotor
-
H. Guckel, K.J. Skrobis, T.R. Christenson, J. Klein, S.I. Han, B. Chai, E.G. Lovell, T.W. Chapman, 'Fabrication and Testing of the Planar Magnetic Micromotor', Journal of Micromechanical Microengineering, 1 (1991) 135-138
-
(1991)
Journal of Micromechanical Microengineering
, vol.1
, pp. 135-138
-
-
Guckel, H.1
Skrobis, K.J.2
Christenson, T.R.3
Klein, J.4
Han, S.I.5
Chai, B.6
Lovell, E.G.7
Chapman, T.W.8
-
3
-
-
0027850847
-
A Planar Variable Reluctance Magnetic Micromotor with Fully Integrated Stator and Coils
-
Dec.
-
C.H. Ahn, Y.J. Kim, M.G. Allen, 'A Planar Variable Reluctance Magnetic Micromotor with Fully Integrated Stator and Coils', IEEE Journal of Microelectromechanical Systems, Vol.2, No. 2, Dec. 1993, pp. 165-173
-
(1993)
IEEE Journal of Microelectromechanical Systems
, vol.2
, Issue.2
, pp. 165-173
-
-
Ahn, C.H.1
Kim, Y.J.2
Allen, M.G.3
-
4
-
-
0033689269
-
Prototype Feedback Controlled Bi-Directional Actuation System for MEMS Application
-
S. Bhansali, A. L. Zhang, R.B. Zmood, P. Jones, D.K. Sood, 'Prototype Feedback Controlled Bi-Directional Actuation System for MEMS Application', IEEE Journal of Microelectromechanical Systems, Vol. 9, No. 2 (2000), pp. 245-251
-
(2000)
IEEE Journal of Microelectromechanical Systems
, vol.9
, Issue.2
, pp. 245-251
-
-
Bhansali, S.1
Zhang, A.L.2
Zmood, R.B.3
Jones, P.4
Sood, D.K.5
-
5
-
-
0033887146
-
Design and Fabrication of a Micro Magnetic Bearing
-
M. K. Ghantasala, L. Qin, D.K. Sood, R.B. Zmood, 'Design and Fabrication of a Micro Magnetic Bearing', J. Smart Material and Structure, Vol. 9. pp.1-6, 2000
-
(2000)
J. Smart Material and Structure
, vol.9
, pp. 1-6
-
-
Ghantasala, M.K.1
Qin, L.2
Sood, D.K.3
Zmood, R.B.4
-
6
-
-
0032098272
-
Fully Integrated Magnetically Actuated Micromachined Relays
-
June
-
W.P. Taylor, O. Brand, M.G. Allen, 'Fully Integrated Magnetically Actuated Micromachined Relays', J. Microelectromechanical Systems, Vol. 7, No. 2, June 1998, pp. 181-191
-
(1998)
J. Microelectromechanical Systems
, vol.7
, Issue.2
, pp. 181-191
-
-
Taylor, W.P.1
Brand, O.2
Allen, M.G.3
-
7
-
-
0004826513
-
A New Electromagnctic Actuator Using Through Hole Plating of Nickel/Iron Permalloy
-
D.J. Sadler, T.M. Liakopoulos, C.H. Ahn, 'A New Electromagnctic Actuator Using Through Hole Plating of Nickel/Iron Permalloy', Electrochemical Society Proceedings, Vol. 98-20, pp. 377-388
-
Electrochemical Society Proceedings
, vol.98
, Issue.20
, pp. 377-388
-
-
Sadler, D.J.1
Liakopoulos, T.M.2
Ahn, C.H.3
-
8
-
-
0031073608
-
Thermally Controlled Magnetization Actuator for Microrelays
-
Feb.
-
E. Hashimoto, H. Tanka, Y. Suzuki, Y. Uenishi, A. Watabe, 'Thermally Controlled Magnetization Actuator for Microrelays , IEICE Trans. Electron, Vol. E80-C, No.2, Feb. 1997, pp.239-245
-
(1997)
IEICE Trans. Electron
, vol.E80-C
, Issue.2
, pp. 239-245
-
-
Hashimoto, E.1
Tanka, H.2
Suzuki, Y.3
Uenishi, Y.4
Watabe, A.5
-
9
-
-
0004128136
-
-
D. Van Norstrand Company, Inc., New Yoyk
-
R. M. Bozorth, Ferromagnetism, D. Van Norstrand Company, Inc., New Yoyk, 1951
-
(1951)
Ferromagnetism
-
-
Bozorth, R.M.1
-
10
-
-
0004877075
-
Magnetic Materials, Processes and Devices IV, Applications to Storage and MEMS
-
L. T. Romankiw and D.A. Herman, eds., 'Magnetic Materials, Processes and Devices IV, Applications to Storage and MEMS' , ECS Proc. 95-18 (1996) 253-272
-
(1996)
ECS Proc.
, vol.95
, Issue.18
, pp. 253-272
-
-
Romankiw, L.T.1
Herman, D.A.2
-
11
-
-
0032560161
-
Asoft magnetic CoNiFc film with high saturation magnetic flux density and low coercivity
-
T. Osaka, M. Takai, K. Hayashi, K. Ohashi, M. Saito, K. Yamada, 'Asoft magnetic CoNiFc film with high saturation magnetic flux density and low coercivity', Nature, 387 (1998), 796
-
(1998)
Nature
, vol.387
, pp. 796
-
-
Osaka, T.1
Takai, M.2
Hayashi, K.3
Ohashi, K.4
Saito, M.5
Yamada, K.6
-
13
-
-
0004825147
-
Ahigh rate clcctroplatincell for Ni-Fe
-
L. T. Ramankiw and D.A. Herman, eds., 'Magnetic Materials, Processes and Devices IV, Applications to Storage and MEMS'
-
U. Cohen, G. Tzanavaras, 'Ahigh rate clcctroplatincell for Ni-Fe', in L. T. Ramankiw and D.A. Herman, eds., 'Magnetic Materials, Processes and Devices IV, Applications to Storage and MEMS', ECS Proc. 95-18 (1996) 773-8
-
(1996)
ECS Proc.
, vol.95
, Issue.18
, pp. 773-778
-
-
Cohen, U.1
Tzanavaras, G.2
-
15
-
-
0004885115
-
Anovel method for electroplating on silicon without the need of a continuous plating base film
-
M.K.Ghantasala, D.K.Sood, 'Anovel method for electroplating on silicon without the need of a continuous plating base film', Proc. SPIE, Smart Electronics and MEMS, Vol. 3242, (1997) 52-58
-
(1997)
Proc. SPIE, Smart Electronics and MEMS
, vol.3242
, pp. 52-58
-
-
Ghantasala, M.K.1
Sood, D.K.2
-
16
-
-
0029771208
-
Electroplated Thick CoNiMcP Permanent Magnet Arrays for Micromachined Magnetic Device Applications
-
San Diego, USA, 11-15 February
-
T. Liakopoulos, W. Zhang, C. Ahn, 'Electroplated Thick CoNiMcP Permanent Magnet Arrays for Micromachined Magnetic Device Applications', 9th Annual Internat. Workshop on MicroElectro Mechanical Systems, San Diego, USA, 11-15 February 1996, pp. 79-84.
-
(1996)
9th Annual Internat. Workshop on MicroElectro Mechanical Systems
, pp. 79-84
-
-
Liakopoulos, T.1
Zhang, W.2
Ahn, C.3
-
18
-
-
0004857969
-
ECD Precious Metal-Cobalt Thin Eilms for Magnetic-Recording Applications
-
P.L. Cavallorti, G. Zhangari, B. Bozzini, G. Hontana, and P.G. Maisto, 'ECD Precious Metal-Cobalt Thin Eilms for Magnetic-Recording Applications', Electrochemical Society Proceedings, 1994, 261-276.
-
(1994)
Electrochemical Society Proceedings
, pp. 261-276
-
-
Cavallorti, P.L.1
Zhangari, G.2
Bozzini, B.3
Hontana, G.4
Maisto, P.G.5
-
19
-
-
0000812047
-
The Electrodeposicion of Platinum and Platinum Alloys
-
M. F., Baumgärtner, and Ch. J Raub, 'The Electrodeposicion of Platinum and Platinum Alloys', Platinum Metals Review, 1988, 32 (4), 188-197
-
(1988)
Platinum Metals Review
, vol.32
, Issue.4
, pp. 188-197
-
-
Baumgärtner, M.F.1
Raub, Ch.J.2
-
20
-
-
25544464838
-
Microstructure and magnetic properties of electrodeposited Co-Pt and Co-Pt-P alloy thin films
-
L. T. Romankiw and D.A. Herman, eds., 'Magnetic Materials, Processes and Devices IV, Applications to Storage and MEMS'
-
P.L.Cavallotti, P.Bucher, N. Lecis, G. Zangari,J.M.Machado da Silva and M.A.Sa, 'Microstructure and magnetic properties of electrodeposited Co-Pt and Co-Pt-P alloy thin films', in L. T. Romankiw and D.A. Herman, eds., 'Magnetic Materials, Processes and Devices IV, Applications to Storage and MEMS', ECS Proc. 95-18 (1996) 169-180
-
(1996)
ECS Proc.
, vol.95
, Issue.18
, pp. 169-180
-
-
Cavallotti, P.L.1
Bucher, P.2
Lecis, N.3
Zangari, G.4
Machado Da Silva, J.M.5
Sa, M.A.6
-
21
-
-
0030562720
-
Electroplated, high Hc CoPt films: DM magneto-optical measurements
-
L. Callegaro, E. Puppin, P.I.. Cavallotti, and G. Zangari, 'Electroplated, high Hc CoPt films: dM magneto-optical measurements', Journal of Magnetism and Magnetic Materials, 1996, 155, 190-192.
-
(1996)
Journal of Magnetism and Magnetic Materials
, vol.155
, pp. 190-192
-
-
Callegaro, L.1
Puppin, E.2
Cavallotti, P.I.3
Zangari, G.4
-
22
-
-
0004885945
-
Elcctrodeposition of Co-Pt Thin Films for Magnetic Recording Media
-
B. Bozzini, A. Martelli, G. Zangari, P.L. Cavallotti, E. Terrenzio, P.C. Visigalli, 'Elcctrodeposition of Co-Pt Thin Films for Magnetic Recording Media', Elecrrochemical Society Proceedings, 92-10, 69-85
-
Elecrrochemical Society Proceedings
, vol.92
, Issue.10
, pp. 69-85
-
-
Bozzini, B.1
Martelli, A.2
Zangari, G.3
Cavallotti, P.L.4
Terrenzio, E.5
Visigalli, P.C.6
-
23
-
-
0029345788
-
Magneto-optical dM measurements of interactions in electroplated CoPt films
-
L. Callegaro, E. Puppin, P.I.. Cavallotti, N. Lecis, and G. Zangari, 'Magneto-optical dM measurements of interactions in electroplated CoPt films'. Journal of Applied Physics, 1995, 78(1), 457-459
-
(1995)
Journal of Applied Physics
, vol.78
, Issue.1
, pp. 457-459
-
-
Callegaro, L.1
Puppin, E.2
Cavallotti, P.I.3
Lecis, N.4
Zangari, G.5
-
24
-
-
0029774664
-
Micromachined Polymer Magnets
-
San Diego, USA, 11-15 February
-
I..K. Lagorce, M.G. Allen, 'Micromachined Polymer Magnets', 9th Annual Internat. Workshop on Micro Electro Mechanical Systems, San Diego, USA, 11-15 February 1996, pp.85-90
-
(1996)
9th Annual Internat. Workshop on Micro Electro Mechanical Systems
, pp. 85-90
-
-
Lagorce, I.K.1
Allen, M.G.2
-
25
-
-
0033101284
-
Magnetic Microactuators Based on Polymer Magnet
-
L.K. Lagorce, O. Brand, M.G. Allen, 'Magnetic Microactuators Based on Polymer Magnet', IEEE J. of Microelectromechenical Systems, Vol. 8, No. 1 (1999), pp. 2-9.
-
(1999)
IEEE J. of Microelectromechenical Systems
, vol.8
, Issue.1
, pp. 2-9
-
-
Lagorce, L.K.1
Brand, O.2
Allen, M.G.3
-
26
-
-
0003779543
-
-
(Chapter 5), SPIE Optical Engineering Press, London
-
P. Rai-Choudhury (ed) Handbook of Microlithography, Micromachining, and Microfabrication (Chapter 5), SPIE Optical Engineering Press, London, 1998
-
(1998)
Handbook of Microlithography, Micromachining, and Microfabrication
-
-
Rai-Choudhury, P.1
-
27
-
-
0029521599
-
Micro Coils Fabricated by UV Depth Lithography and Galvanoplating
-
Stockolm, Sweden, June 25-29
-
B. Lochel, A. Macioosek, M. Rothe, W. Windbrackc, 'Micro Coils Fabricated by UV Depth Lithography and Galvanoplating', Tranducers'95, The 8th International Conference on Solid-State Sensors and Actuators, Stockolm, Sweden, June 25-29, 1995, pp. 264-298
-
(1995)
Tranducers'95, the 8th International Conference on Solid-State Sensors and Actuators
, pp. 264-298
-
-
Lochel, B.1
Macioosek, A.2
Rothe, M.3
Windbrackc, W.4
-
28
-
-
0001777495
-
A Micro Fluxgate Magnetic Sensor Using Micromachined 3-Dimensional Planar Coils
-
Hilton Head Island, South California, June 8-11
-
T.M. Liakopoulos, M. Xu, C.H. Ahn, 'A Micro Fluxgate Magnetic Sensor Using Micromachined 3-Dimensional Planar Coils', Solid-state Sensor and Actuator Workshop, Hilton Head Island, South California, June 8-11, 1998, pp. 19-22
-
(1998)
Solid-state Sensor and Actuator Workshop
, pp. 19-22
-
-
Liakopoulos, T.M.1
Xu, M.2
Ahn, C.H.3
-
29
-
-
0031223865
-
Micromachined Semi-Encapsulated Spiral Inductors for Micro Electro Mechanical Systems (MEMS) Application
-
Sept.
-
D.J. Sadler, W. Zhang, C.H. Ahn, 'Micromachined Semi-Encapsulated Spiral Inductors For Micro Electro Mechanical Systems (MEMS) Application', IEEE Trans. Magnetics, Vol. 33, No. 5, Sept. 1997, pp. 3319-3321
-
(1997)
IEEE Trans. Magnetics
, vol.33
, Issue.5
, pp. 3319-3321
-
-
Sadler, D.J.1
Zhang, W.2
Ahn, C.H.3
-
30
-
-
0000296779
-
Microfabricated Toridal-Type Planar Inductors for MEMS and Power Electronic Applications
-
T.M. Liakopoulos, C.H. Ahn, 'Microfabricated Toridal-Type Planar Inductors For MEMS and Power Electronic Applications', Electrochemical Society Proceedings, Vol. 98-20, pp.402-422
-
Electrochemical Society Proceedings
, vol.98
, Issue.20
, pp. 402-422
-
-
Liakopoulos, T.M.1
Ahn, C.H.2
-
31
-
-
0031220703
-
Ferrite-Based Integrated Planar Inductors and Transformers Fabricated at Low Temperature
-
Sept.
-
J.Y. Park, I..K. Lagoree, M.G. Allen, 'Ferrite-Based Integrated Planar Inductors and Transformers Fabricated at Low Temperature', IEEE Trans. Magnetics, Vol. 33, No. 5, Sept. 1997, pp. 3322-3324
-
(1997)
IEEE Trans. Magnetics
, vol.33
, Issue.5
, pp. 3322-3324
-
-
Park, J.Y.1
Lagoree, I.K.2
Allen, M.G.3
-
32
-
-
0018496252
-
Micromechanical Membrane Switches on Silicon
-
K.E. Petersen, 'Micromechanical Membrane Switches on Silicon', IBM J. Res. Develop., Vol 23, No 4, 1979
-
(1979)
IBM J. Res. Develop.
, vol.23
, Issue.4
-
-
Petersen, K.E.1
-
33
-
-
0033899332
-
ASimplified Approach for Accurate Estimation of Iransverse Magnetic Forces in Micro Actuators having Inclined Pole Faces
-
L. Qin, R.B. Zmood, 'ASimplified Approach for Accurate Estimation of Iransverse Magnetic Forces in Micro Actuators having Inclined Pole Faces'. journal of Micromechanics and Microengineering, Vol. 10, pp. 28-33. 2000
-
(2000)
Journal of Micromechanics and Microengineering
, vol.10
, pp. 28-33
-
-
Qin, L.1
Zmood, R.B.2
-
34
-
-
0033336102
-
Design of a Micro Magnetic Bearing Actuator
-
proc. Electronics and Structures of MEMS
-
L. Qin, R.B. Zmood, 'Design of a Micro Magnetic Bearing Actuator, in proc. Electronics and Structures of MEMS (Proceedings of SPIE Vol. 3891) 1999, pp. 199-209
-
(1999)
Proceedings of SPIE
, vol.3891
, pp. 199-209
-
-
Qin, L.1
Zmood, R.B.2
-
35
-
-
0033317204
-
Versatile Microsensor for Micromachine Application
-
Proc. Electronics and Structures of MEMS
-
P.I.. Yu, R.B. Zmood, 'Versatile Microsensor for Micromachine Application', in Proc. Electronics and Structures of MEMS (Proceedings of SPIE), 1999, Vol. 3891, pp. 192-198
-
(1999)
Proceedings of SPIE
, vol.3891
, pp. 192-198
-
-
Yu, P.I.1
Zmood, R.B.2
-
36
-
-
0029516642
-
Thermally Controlled Magnetization Micro Relay
-
Sweden, June
-
E. Hashimito, Y. Uenishi, A. Watabe, 'Thermally Controlled Magnetization Micro Relay', Transducer'95, 8th International Conference on Solid-State Sensors and Actuators , Sweden, June , 1995, 361-364
-
(1995)
Transducer'95, 8th International Conference on Solid-State Sensors and Actuators
, pp. 361-364
-
-
Hashimito, E.1
Uenishi, Y.2
Watabe, A.3
|