Formation of ordered pore arrays at the nanoscale by electrochemical etching of n-type silicon

Superlattices and Microstructures

Volumn 36, Issue 1-3, 2004, Pages 245-253

  Badel, X ^a   Kumar, R T Rajendra ^b   Kleimann, P ^c   Linnros, J ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b STOCKHOLM UNIVERSITY   (Sweden)

^c UNIVERSITÉ LYON 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROLYTIC POLISHING; ETCHING; HYDROFLUORIC ACID; LITHOGRAPHY; PORE SIZE; SILICON WAFERS;

DRY OXIDE ETCHING; ELECTROCHEMICAL ETCHING (ECE); PORE ARRAYS; SPACE CHARGE REGION (SCR);

SILICON;

EID: 9644259379     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.spmi.2004.08.037     Document Type: Article

References (18)

1. D.R. Turner, J. Electrochem. Soc. 105 (1958) 402.
2. R.L. Smith, J.D. Collins, J. Appl. Phys. 71 (8) (1992) R1.
3. V. Lehmann, H. Föll, J. Electrochem. Soc. 137 (2) (1990) 653.
4. P. Kleimann, J. Linnros, R. Juhasz, Appl. Phys. Lett. 79 (11) (2001) 1727.
5. E.J. Teo, M.B.H. Breese, E.P. Tavernier, A.A. Bettiol, F. Watt, M.H. Liu, D.J. Blackwood, Appl. Phys. Lett. 84 (16) (2004) 3202.
6. A. Vyatkin, V. Starkov, J. Electrochem. Soc. 149 (1) (2002) G70.
7. V. Lehmann, J. Electrochem. Soc. 140 (10) (1993) 2836.
8. J. Carstensen, M. Christophersen, H. Föll, Mater. Sci. Eng. B 69-70 (2000) 23.
9. V. Lehmann, R. Stengl, A. Luigart, Mater. Sci. Eng. B 69-70 (2000) 11.
10. X. Badel, J. Linnros, P. Kleimann, Electrochem. Solid State Lett. 6 (6) (2003) C79.
11. H. Föll, M. Christophersen, J. Carstensen, G. Hasse, Mater. Sci. Eng. R 39 (2002) 93.
12. P. Kleimann, J. Linnros, C.S. Petersson, Mater. Sci. Eng. B 69-70 (2000) 29.
13. J. Schllling, F. Muller, S. Matthias, R.B. Wehrspohn, U. Gösele, K. Busch, Appl. Phys. Lett. 78 (9) (2001) 1180.
14. F.D. Morisson, L. Ramsay, J.F. Scott, J. Phys.: Condens. Matter 15 (2003) L527.
15. X. Badel, J. Linnros, M.S. Janson, J. Österman, Nucl. Instrum. Methods A 509 (2003) 96.
16. V. Lehmann, Electrochemistry of Silicon, Wlley-VCH Verlag GmbH, 2002, Silicon conversion table.
17. X.G. Zhang, Electrochemistry of Silicon and Its Oxide, Kluwer Academic/Plenum Publishers, New York, 2001, p. 27.
18. Y. Chen, A. Lebib, S. Li, A. Pépin, D. Peyrade, M. Natali, E.Cambril, Eur. Phys. J. AP. 12 (2000) 223.