Electron states at the (1 0 0)Ge/HfO2 Interface

Materials Science in Semiconductor Processing

Volumn 7, Issue 4-6 SPEC. ISS., 2004, Pages 191-196

  Afanas'ev, V V ^a   Fedorenko, Y G ^a   Stesmans, A ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Band offsets; Germanium; Interface barrier; Interface traps; Internal photoemission

Indexed keywords

ANNEALING; ELECTRON ENERGY LEVELS; HAFNIUM COMPOUNDS; INTERFACES (MATERIALS); OXYGEN; PHOTOEMISSION;

BAND OFFSETS; INTERFACE BARRIERS; INTERFACE TRAPS; INTERNAL PHOTOEMISSION;

SEMICONDUCTING GERMANIUM;

EID: 9544234497     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2004.09.085     Document Type: Conference Paper

References (19)

1. Wilk GD, Wallace RM, Anthony JM. J Appl Phys 2001;89:5243.
2. See, e.g., Nicolet M-A, Liu W-S. Microelectron Eng 1995; 28:185.
3. Peacock PW, Robertson J. J Appl Phys 2002;92:4712.
4. Ranke W, Wasserfall J. Surf Sci 1994;303:45.
5. Adamchuk VK, Afanas'ev VV. Prog Surf Sci 1992;41:111.
6. Afanas'ev VV, Stesmans A, Andersson MO. Phys Rev B 1996;54:10820.
7. Afanas'ev VV, Houssa M, Stesmans A, Heyns MM. J Appl Phys 2002;91:3079.
8. Afanas'ev VV, Stesmans A, Tsai W. Appl Phys Lett 2003;82:245.
9. Afanas'ev VV, Stesmans A, Chen F, Shi X, Campbell SA. Appl Phys Lett 2002;81:1053.
10. Powell RJ. J Appl Phys 1970;41:2424.
11. DiStefano TH, Lewis JE. J Vac Sci Technol 1974;11:1020.
12. Afanas'ev VV, Houssa M, Stesmans A, Heyns MM. Appl Phys Lett 2001;78:3073.
13. Oishi K, Matsuo Y. Thin Solid Films 1996;274:133.
14. Kasumov Yu.N, Kozlov SN. Sov J Phys Chem Mech Surf. (Poverkhnost: Fysika, Khimiya, Mechanika), 1988; (3): 78 (in Russian).
15. Lange T, Njorode W, Weis H, Beekers M, Wuttig M. Thin Solid Films 2000;365:82.
16. See, e.g., Houssa M, Naili M, Zhao C, Bender H, Heyns MM, Stesmans A. Semicond Sci Technol 2001;16:31.
17. Stesmans A, Afanas'ev VV. Appl Phys Lett 2003;82:4074.
18. Stesmans A, Afanas'ev VV. Phys Rev B 1998;57:10030.
19. Fedorenko YG, Truong L, Afanas'ev VV, Stesmans A. Appl Phys Lett 2004;84:4771.