Influence of thermal annealing on optical properties and structure of aluminium oxide thin films by filtered cathodic vacuum arc

Optical Materials

Volumn 27, Issue 3, 2004, Pages 465-469

  Zhao, Z W ^a   Tay, B K ^a   Huang, L ^a   Lau, S P ^a   Gao, J X ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Aluminium oxide; Optical properties; Thermal annealing

Indexed keywords

ALUMINA; AMORPHOUS MATERIALS; HIGH TEMPERATURE EFFECTS; LIGHT EXTINCTION; RAPID THERMAL ANNEALING; REFRACTIVE INDEX; SURFACE ROUGHNESS; VACUUM;

AMORPHOUS STRUCTURE; OPTICAL CONSTANTS; STRUCTURAL PROPERTIES; THERMAL ANNEALING;

THIN FILMS;

EID: 9544223205     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optmat.2004.03.027     Document Type: Article

References (15)

1. C.C. Lee, J.C. Hsu, D.H. Wong, Appl. Surf. Sci. 171 (2001) 151.
2. C.C. Lee, D.T. Wei, J.C. Hsu, Thin Solid Films 290/291 (1996) 88.
3. H.A. Macleod, Thin-Film Optical filters, third ed., Institue of Physics Publishing, Bristol, Philadelphia, 2001.
4. J.M. Mor, J.A. Agostinelli, J. Vac. Sci. Technol. A 12 (1994) 1439.
5. C.C. Lee, J.C. Hsu, D.H. Wong, Opt. Quant. Electron. 32 (2000) 327.
6. C. Jeong, B. Lee, S. Joo, Mater. Sci. Eng. C 16 (2001) 59.
7. J.F. Moore, D.R. Strongin, P.B. Comita, M.W. Ruckman, M. Strongin, Appl. Phys. Lett. 64 (1994) 368.
8. X. Shi, B.K. Tay, H.S. Tan, L. Zhong, Y.Q. Tu, S.R.P. Silva, J. Appl. Phys. 79 (1996) 7234.
9. X. Shi, B.K. Tay, S.P. Lau, Int. J. Mod. Phys. B 14 (2000) 136.
10. W. Theiss, in: M. Theiss (Ed.), Scout Thin Film Analysis Software Handbook, Hard- and Software, Aachen, Germany.
11. Z.W. Zhao, B.K. Tay, S.P. Lau, C.Y. Xiao, J. Vac. Sci. Technol. A 21 (2003) 906.
12. W. Heitmann, Thin Solid Films 5 (1970) 61.
13. Z.W. Zhao, B.K. Tay, C.Q. Sun, V. Ligatchev, J. Appl. Phys. 95 (2004) 4147.
14. R.A. Street, Hydrogenated Amorphous Silicon, Cambridge University Press, 1991.
15. James D. Rancourt, Optical Thin Films-user's Handbook, Macmillan Publishing Company, New York, 1987.