New challenges to the modelling and electrical characterisation of ohmic contacts for ULSI devices

Microelectronics Reliability

Volumn 40, Issue 6, 2000, Pages 965-971

  Holland, A S ^a   Reeves, G K ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RESISTANCE; INTEGRATED CIRCUIT TESTING; OHMIC CONTACTS; RESISTORS; SEMICONDUCTOR DEVICE MODELS;

CROSS KELVIN RESISTOR (CKR); SPECIFIC CONTACT RESISTANCE (SCR);

ULSI CIRCUITS;

EID: 8744281506     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2714(00)00006-8     Document Type: Article

References (13)

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