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Volumn 514, Issue , 1998, Pages 363-368

Kelvin test structure modeling of metal-silicide-silicon contacts

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; FINITE ELEMENT METHOD; INTERFACES (MATERIALS); MATHEMATICAL MODELS; SEMICONDUCTOR QUANTUM WELLS; SILICON; THREE DIMENSIONAL;

EID: 0032287943     PISSN: 02729172     EISSN: None     Source Type: None    
DOI: 10.1557/proc-514-363     Document Type: Conference Paper
Times cited : (4)

References (12)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.