|
Volumn 514, Issue , 1998, Pages 363-368
|
Kelvin test structure modeling of metal-silicide-silicon contacts
a a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
CURRENT DENSITY;
FINITE ELEMENT METHOD;
INTERFACES (MATERIALS);
MATHEMATICAL MODELS;
SEMICONDUCTOR QUANTUM WELLS;
SILICON;
THREE DIMENSIONAL;
CONTACT RESISTANCE;
CROSS KELVIN RESISTOR;
INTERFACIAL RESISTANCE;
SILICIDE;
OHMIC CONTACTS;
|
EID: 0032287943
PISSN: 02729172
EISSN: None
Source Type: None
DOI: 10.1557/proc-514-363 Document Type: Conference Paper |
Times cited : (4)
|
References (12)
|