Error correction for finite semiconductor resistivity in Kelvin test structures

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1997, Pages 95-98

  Holland, Anthony S ^a   Reeves, Geoffrey K ^a   Harrison, H Barry ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CROSS BRIDGE KELVIN RESISTORS;

COMPUTER AIDED NETWORK ANALYSIS; ERROR CORRECTION; OHMIC CONTACTS; SEMICONDUCTOR DEVICE STRUCTURES;

RESISTORS;

EID: 0030682960     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)