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Volumn , Issue 1413, 2001, Pages 109-126

High accuracy measurement of elastic constants of thin films by surface brillouin scattering

Author keywords

Acoustic waves; Brillouin scattering; Elastic constants; Surface waves; Thin films

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; BRILLOUIN SCATTERING; COMPUTATIONAL METHODS; DATA REDUCTION; ELASTIC MODULI; ERROR ANALYSIS; FUNCTIONS;

EID: 8744275704     PISSN: 00660558     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1520/stp10985s     Document Type: Conference Paper
Times cited : (8)

References (44)
  • 1
    • 36449000853 scopus 로고
    • Elastic constants of single crystal transition-metal nitride films measured by line-focus acoustic microscopy
    • Kim, J. O., Achenbach, J. D., Mirkarimi, P. B., Shinn M., and Barnett, S. A., "Elastic Constants of Single Crystal Transition-Metal Nitride Films Measured by Line-Focus Acoustic Microscopy," Journal of Applied Physics, Vol. 72, 1992, pp. 805-1811.
    • (1992) Journal of Applied Physics , vol.72 , pp. 805-1811
    • Kim, J.O.1    Achenbach, J.D.2    Mirkarimi, P.B.3    Shinn, M.4    Barnett, S.A.5
  • 2
    • 0010306967 scopus 로고
    • Lens geometries for quantitative acoustic microscopy
    • A. Briggs, Ed., Plenum Press, New York
    • Atalar, A., Koymen, H., Bozkurt, A., and Yaralioglu, G., "Lens Geometries for Quantitative Acoustic Microscopy," Advances in Acoustic Microscopy, A. Briggs, Ed., Plenum Press, New York, 1995, pp. 117-151.
    • (1995) Advances in Acoustic Microscopy , pp. 117-151
    • Atalar, A.1    Koymen, H.2    Bozkurt, A.3    Yaralioglu, G.4
  • 3
    • 0000474953 scopus 로고
    • Measuring the elastic properties of stressed materials by quantitative acoustic microscopy
    • A. Briggs, Ed., Plenum Press, New York
    • Sklar, Z., Mutti, P., Stoodley, N. C., and Briggs, G. A. D., "Measuring the Elastic Properties of Stressed Materials by Quantitative Acoustic Microscopy," Advances in Acoustic Microscopy, A. Briggs, Ed., Plenum Press, New York, 1995, pp. 209-247.
    • (1995) Advances in Acoustic Microscopy , pp. 209-247
    • Sklar, Z.1    Mutti, P.2    Stoodley, N.C.3    Briggs, G.A.D.4
  • 4
    • 0001486197 scopus 로고
    • Laser generation and detection of surface acoustic waves: Elastic properties of surface layers
    • Neubrand, A. and Hess, P., "Laser Generation and Detection of Surface Acoustic Waves: Elastic Properties of Surface Layers," Journal of Applied Physics, Vol. 71, 1992, pp. 227-238.
    • (1992) Journal of Applied Physics , vol.71 , pp. 227-238
    • Neubrand, A.1    Hess, P.2
  • 5
    • 0031074321 scopus 로고    scopus 로고
    • Nondestructive evaluation of diamond and diamond-like carbon films by laser induced surface acoustic waves
    • Schneider, D., Schwarz, Th., Scheibe, H. J., and Panzner, M., "Nondestructive Evaluation of Diamond and Diamond-Like Carbon Films by Laser Induced Surface Acoustic Waves," Thin Solid Films, Vol. 295, 1997, pp. 107-116.
    • (1997) Thin Solid Films , vol.295 , pp. 107-116
    • Schneider, D.1    Schwarz, Th.2    Scheibe, H.J.3    Panzner, M.4
  • 7
    • 0000578216 scopus 로고
    • Trends in brillouin scattering
    • M. Cardona and G. Güntherodt, Eds., G. Springer, Berlin
    • Sandercock, J. R., "Trends in Brillouin Scattering," Light Scattering in Solids III, M. Cardona and G. Güntherodt, Eds., G. Springer, Berlin, 1982, pp. 173-206.
    • (1982) Light Scattering in Solids III , pp. 173-206
    • Sandercock, J.R.1
  • 8
    • 0010753664 scopus 로고
    • Surface vibrations
    • V. M. Agranovitch and R. Loudon, Eds., Elsevier Science Publishers
    • Stegeman, G. I. and Nizzoli, F., "Surface Vibrations," Surface Excitations, V. M. Agranovitch and R. Loudon, Eds., Elsevier Science Publishers, 1984, pp. 195-378.
    • (1984) Surface Excitations , pp. 195-378
    • Stegeman, G.I.1    Nizzoli, F.2
  • 9
    • 0001454097 scopus 로고
    • Surface brillouin scattering from phonons
    • G. K. Horton and A. A. Maradudin, Eds., Elsevier Science Publishers B.V., Amsterdam
    • Nizzoli, F. and Sandercock, J. R., "Surface Brillouin Scattering from Phonons," Dynamical Properties of Solids, Vol. 6, G. K. Horton and A. A. Maradudin, Eds., Elsevier Science Publishers B.V., Amsterdam, 1990, pp. 281-335.
    • (1990) Dynamical Properties of Solids , vol.6 , pp. 281-335
    • Nizzoli, F.1    Sandercock, J.R.2
  • 10
  • 13
    • 8844219733 scopus 로고    scopus 로고
    • Derivation of elastic Properties of thin films from measured acoustic velocities
    • C. Muhlstein and S. B. Brown, Eds., American Society for Testing and Materials, West Conshohocken, PA
    • Pastprelli, R., Tarantola, S., Beghi, M. G., Bottani, C. E., and Saltelli, A., "Derivation of Elastic Properties of Thin Films from Measured Acoustic Velocities," Mechanical Properties of Structural Films, ASTM STP 1413, C. Muhlstein and S. B. Brown, Eds., American Society for Testing and Materials, West Conshohocken, PA, 2001.
    • (2001) Mechanical Properties of Structural Films, ASTM STP , vol.1413
    • Pastprelli, R.1    Tarantola, S.2    Beghi, M.G.3    Bottani, C.E.4    Saltelli, A.5
  • 14
    • 85012587852 scopus 로고
    • Properties of elastic surface waves
    • W. P. Mason and R. N. Thurston eds.,Academic, New York
    • Farnell, G. W., "Properties of Elastic Surface Waves," Physical Acoustics, Vol. 6, W. P. Mason and R. N. Thurston eds.,Academic, New York, 1970, pp.109-166.
    • (1970) Physical Acoustics , vol.6 , pp. 109-166
    • Farnell, G.W.1
  • 15
    • 84970134245 scopus 로고
    • Elastic wave propagation in thin layers
    • W. P. Mason and R. N. Thurston, Eds., Academic Press, New York
    • Farnell G. W. and Adler E. L., "Elastic wave propagation in thin layers," in W. P. Mason and R. N. Thurston, Eds., Physical Acoustics, Vol. 9, Academic Press, New York, 1972, pp. 35-127.
    • (1972) Physical Acoustics , vol.9 , pp. 35-127
    • Farnell, G.W.1    Adler, E.L.2
  • 16
    • 0004051726 scopus 로고
    • Brillouin scattering from shear horizontal surface phonons in silicon on insulator structures: Theory and experiment
    • Ghislotti, G. and Bottani, C. E., "Brillouin Scattering from Shear Horizontal Surface Phonons in Silicon on Insulator Structures: Theory and Experiment," Physical Review B, Vol. 50, 1994, pp. 12131-12137.
    • (1994) Physical Review B , vol.50 , pp. 12131-12137
    • Ghislotti, G.1    Bottani, C.E.2
  • 17
    • 0001767871 scopus 로고
    • Theory of surface ripple brillouin scattering by solids
    • Loudon, R., "Theory of Surface Ripple Brillouin Scattering by Solids," Physical Review Letters, Vol. 40, 1978, p. 581.
    • (1978) Physical Review Letters , vol.40 , pp. 581
    • Loudon, R.1
  • 18
    • 0000775562 scopus 로고    scopus 로고
    • Computation of brillouin scattering cross sections for multilayers
    • Amici, A., Beghi, M. G., and Bottani, C. E., "Computation of Brillouin Scattering Cross Sections for Multilayers," Computational Materials Science, Vol. 17, 2000, pp. 404-408.
    • (2000) Computational Materials Science , vol.17 , pp. 404-408
    • Amici, A.1    Beghi, M.G.2    Bottani, C.E.3
  • 19
    • 0030837225 scopus 로고    scopus 로고
    • Combined surface brillouin scattering and X-ray reflectivity characterization of thin metallic films
    • Beghi, M. G., Bottani, C. E., Ossi, P. M., Lafford, T., and Tanner, B. K., "Combined Surface Brillouin Scattering and X-Ray Reflectivity Characterization of Thin Metallic Films," Journal of Applied Physics, Vol. 81, 1997, pp. 672-678.
    • (1997) Journal of Applied Physics , vol.81 , pp. 672-678
    • Beghi, M.G.1    Bottani, C.E.2    Ossi, P.M.3    Lafford, T.4    Tanner, B.K.5
  • 22
    • 0001648024 scopus 로고
    • Light scattering from surface acoustic phonons in metals and semiconductors
    • Sandercock, J. R., "Light Scattering from Surface Acoustic Phonons in Metals and Semiconductors," Solid State Communications, Vol. 26, 1978, pp. 547-551.
    • (1978) Solid State Communications , vol.26 , pp. 547-551
    • Sandercock, J.R.1
  • 23
    • 0000455639 scopus 로고
    • Brillouin scattering: A tool for the measurement of elastic and photoelastic constants
    • Vacher, R. and Boyer, L., "Brillouin Scattering: A Tool for the Measurement of Elastic and Photoelastic Constants," Physical Review B, Vol. 6, 1972, pp. 639-673.
    • (1972) Physical Review B , vol.6 , pp. 639-673
    • Vacher, R.1    Boyer, L.2
  • 27
    • 0001274248 scopus 로고    scopus 로고
    • Brillouin and raman scattering in natural and isotopically controlled diamond
    • Vogelgesang, R., Ramdas, A. K., Rpdriguez, S., Grimsditch, M., and Anthony, T. R., "Brillouin and Raman Scattering in Natural and Isotopically Controlled Diamond," Physical Review B, Vol. 54, 1996, pp. 3989-3999.
    • (1996) Physical Review B , vol.54 , pp. 3989-3999
    • Vogelgesang, R.1    Ramdas, A.K.2    Rpdriguez, S.3    Grimsditch, M.4    Anthony, T.R.5
  • 28
    • 0141738214 scopus 로고    scopus 로고
    • Brillouin scattering
    • M. Levy, H. Bass, R. Stem, and V. Keppens, Eds., Academic Press/Harcourt Publishers Ltd., Sidcup, UK
    • Grimsditch, M., "Brillouin Scattering," Handbook of Elastic Properties of Solids, Liquids and Gases, Vol. 1, M. Levy, H. Bass, R. Stem, and V. Keppens, Eds., Academic Press/Harcourt Publishers Ltd., Sidcup, UK, 2000.
    • (2000) Handbook of Elastic Properties of Solids, Liquids and Gases , vol.1
    • Grimsditch, M.1
  • 29
    • 8844281818 scopus 로고
    • Theory of brillouin scattering from an isotropic elastic film
    • Albuquerque, E. L., Oliveros, M. C., and Tilley D. R., "Theory of Brillouin Scattering from an Isotropic Elastic Film," Journal of Physics C, Vol. 17, 1984, pp. 1451-1463.
    • (1984) Journal of Physics C , vol.17 , pp. 1451-1463
    • Albuquerque, E.L.1    Oliveros, M.C.2    Tilley, D.R.3
  • 30
    • 0000445429 scopus 로고
    • Lamb waves in unsupported thin films: A brillouin scattering study
    • Grimsditch, M., Bhadra, R. and Schuller, I. K., "Lamb Waves in Unsupported Thin Films: a Brillouin Scattering Study," Physical Review Letters, Vol. 58, 1987, pp. 1216-1219.
    • (1987) Physical Review Letters , vol.58 , pp. 1216-1219
    • Grimsditch, M.1    Bhadra, R.2    Schuller, I.K.3
  • 32
    • 33744558131 scopus 로고
    • Elastic surface waves in crystals with overlayers: Cubic symmetry
    • Hardouin Duparc, O., Sanz-Velasco, E., and Velasco, V. R., "Elastic Surface Waves in Crystals with Overlayers: Cubic Symmetry," Physical Review B, Vol. 30, 1984, pp. 2042-2048.
    • (1984) Physical Review B , vol.30 , pp. 2042-2048
    • Hardouin Duparc, O.1    Sanz-Velasco, E.2    Velasco, V.R.3
  • 33
    • 0000663969 scopus 로고    scopus 로고
    • Localized and resonant guided elastic waves in an adsorbed layer on a semi-infinite superlattice
    • Bria, D., El Boudouti, E. H., Nougaoui, A., Djafari-Rouhani, B., and Velasco, V. R., "Localized and Resonant Guided Elastic Waves in an Adsorbed Layer on a Semi-Infinite Superlattice," Physical Review B, Vol. 61, 2000, pp. 15858-15865.
    • (2000) Physical Review B , vol.61 , pp. 15858-15865
    • Bria, D.1    El Boudouti, E.H.2    Nougaoui, A.3    Djafari-Rouhani, B.4    Velasco, V.R.5
  • 34
    • 0004732008 scopus 로고
    • Elastic properties of epitaxial ZnSe(001) films on GaAs measured by brillouin Spectrpscopy
    • Lee, S., Hillebrands, B., Stegeman, G. I., Cheng, H., Potts, J. E., and Nizzoli, F., "Elastic Properties of Epitaxial ZnSe(001) Films on GaAs Measured by Brillouin Spectrpscopy" Journal of Applied Physics, Vol. 63, 1988, pp. 1914-1916.
    • (1988) Journal of Applied Physics , vol.63 , pp. 1914-1916
    • Lee, S.1    Hillebrands, B.2    Stegeman, G.I.3    Cheng, H.4    Potts, J.E.5    Nizzoli, F.6
  • 37
    • 0000488018 scopus 로고
    • Determination of elastic constants of thin films from phase velocity dispersion of different surface acoustic wave modes
    • Makarov, S., Chilla, E., and Frölich, H. J., "Determination of Elastic Constants of Thin Films from Phase Velocity Dispersion of Different Surface Acoustic Wave Modes," Journal of Applied Physics, Vol. 78, 1995, pp. 5028-5034.
    • (1995) Journal of Applied Physics , vol.78 , pp. 5028-5034
    • Makarov, S.1    Chilla, E.2    Frölich, H.J.3
  • 40
    • 0001402236 scopus 로고    scopus 로고
    • Surface brillouin scattering
    • M. Levy, H. Bass, R. Stern,and V. Keppens, Eds., Academic Press/Harcourt Publishers Ltd., Sidcup, UK
    • Comins, J. D., "Surface Brillouin Scattering," Handbook of Elastic Properties of Solids, Liquids and Gases, Vol. 1, M. Levy, H. Bass, R. Stern,and V. Keppens, Eds., Academic Press/Harcourt Publishers Ltd., Sidcup, UK, 2000.
    • (2000) Handbook of Elastic Properties of Solids, Liquids and Gases , vol.1
    • Comins, J.D.1
  • 41
    • 0034318765 scopus 로고    scopus 로고
    • Design of surface brilkuin scattering experiments by sensitivity analysis
    • Pastorelli, R., Tarantola, S., Beghi, M. G., Bottani, C. E., and Saltelli A., "Design of Surface Brilkuin Scattering Experiments by Sensitivity Analysis," Surface Science, Vol. 468, 2000, pp. 37-50.
    • (2000) Surface Science , vol.468 , pp. 37-50
    • Pastorelli, R.1    Tarantola, S.2    Beghi, M.G.3    Bottani, C.E.4    Saltelli, A.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.