Derivation of elastic properties of thin films from measured acoustic velocities

ASTM Special Technical Publication

Volumn , Issue 1413, 2001, Pages 152-167

  Pastorelli, R ^a   Tarantola, S ^b   Beghi, M G ^a   Bottani, C E ^a   Saltelli, A ^b  

^a POLITECNICO DI MILANO   (Italy)

^b JOINT RESEARCH CENTRE   (Italy)

Author keywords

Acoustic waves; Elastic constants; Inverse problem; Sensitivity analysis; Surface waves; Thin films

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; COMPUTATIONAL METHODS; COMPUTER SIMULATION; ELASTICITY; INVERSE PROBLEMS; PROBLEM SOLVING; SENSITIVITY ANALYSIS;

BULK WAVES; DISPERSION RELATIONS; LAYERED STRUCTURES; MASS DENSITY;

THIN FILMS;

EID: 8844219733     PISSN: 00660558     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1520/stp10988s     Document Type: Conference Paper

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