SCOPUS 정보 검색 플랫폼

Key Engineering Materials

Volumn 264-268, Issue I, 2004, Pages 459-464

Formation of PZT thin films on 6-inch wafers by liquid delivery metalorganic chemical vapor deposition

(3) Otani, Y a Okamura, S a Shiosaki, T a

a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY (Japan)

Author keywords

6 inch Si; Liquid delivery; MOCVD; Pbptx; PZT; Thin films

Indexed keywords

COERCIVE FORCE; CRYSTALLINE MATERIALS; DEPOSITION; ELECTRIC POTENTIAL; HYSTERESIS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PISTONS; POLARIZATION;

6-INCH SI; LIQUID DELIVERY; PBPTX; PZT;

FERROELECTRIC THIN FILMS;

EID: 8644226189 PISSN: 10139826 EISSN: 16629795 Source Type: Book Series
DOI: 10.4028/www.scientific.net/kem.264-268.459 Document Type: Conference Paper

Times cited : (1)

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