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Volumn 46, Issue , 2002, Pages 115-124

Fabrication of Pb(Zr, Ti)O3 thin films by liquid delivery MOCVD using a cocktail source with Pb(METHD)2, Zr(METHD)4 and Ti(MPD)(METHD)2

(6) Otani, Yohei a Abe, Norikazu a Ueda, Yoshiki a Miyake, Masato a Okamura, Soichiro a Shiosaki, Tadashi a

a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY (Japan)

Author keywords

Cocktail source; Liquid delivery; MOCVD; PbPtx; PZT thin films

Indexed keywords

CRYSTALLIZATION; DECOMPOSITION; ELECTRODES; INTERFACES (MATERIALS); LEAD COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PEROVSKITE; PLATINUM; POLARIZATION; VAPORS;

COCKTAIL SOURCES; LIQUID DELIVERY; PZT THIN FILMS; VAPORIZER TEMPERATURE;

FERROELECTRIC THIN FILMS;

EID: 0344704742 PISSN: 10584587 EISSN: 16078489 Source Type: Conference Proceeding
DOI: 10.1080/10584580215398 Document Type: Article

Times cited : (5)

References (9)

1
- 33746321181
- Extended Abstracts of the, Sep. 26-29, Providence, USA
- th US-Japan Seminar on Dielectric and Piezoelectric Ceramics, Sep. 26-29, Providence, USA, (2001) 109.
- (2001) th US-Japan Seminar on Dielectric and Piezoelectric Ceramics , pp. 109
- Shiosaki, T.¹ Okamura, S.²

2
- 18344400831
- D. Burgess, F. Schiente, J. Lindner, M. Schumacher, H. Juergensen, N. Solayappan, L. Mcmillan, C. Paz de Araujo, K.Uchiyama and T. Otsuki, Jpn. J. Appl. Phys., 39 (2000) 5485.
- (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 5485
- Burgess, D.¹ Schiente, F.² Lindner, J.³ Schumacher, M.⁴ Juergensen, H.⁵ Solayappan, N.⁶ Mcmillan, L.⁷ Paz De Araujo, C.⁸ Uchiyama, K.⁹ Otsuki, T.¹⁰

3
- 0032316432
- P. Buskirk, J. Roeder, T. Baum, S. Bilodeau, M. Russell, S. Johnston, R. Carl, D. Desrochers, B. Hendrix and F. Hintermaier, Integrated Ferroelectrics, 21 (1998) 273.
- (1998) Integrated Ferroelectrics , vol.21 , pp. 273
- Buskirk, P.¹ Roeder, J.² Baum, T.³ Bilodeau, S.⁴ Russell, M.⁵ Johnston, S.⁶ Carl, R.⁷ Desrochers, D.⁸ Hendrix, B.⁹ Hintermaier, F.¹⁰

4
- 0031331678
- C. Isobe, T. Ami, K. Hironaka, K. Watanabe, M. Sugiyama, N. Nagel, K. Katori, Y. Ikeda, C. D. Gutleben, M. Tanaka, H. Yamoto and H. Yagi, Integrated Ferroelectrics, 14 (1997) 95.
- (1997) Integrated Ferroelectrics , vol.14 , pp. 95
- Isobe, C.¹ Ami, T.² Hironaka, K.³ Watanabe, K.⁴ Sugiyama, M.⁵ Nagel, N.⁶ Katori, K.⁷ Ikeda, Y.⁸ Gutleben, C.D.⁹ Tanaka, M.¹⁰ Yamoto, H.¹¹ Yagi, H.¹²

5
- 33746285936
- F. Zhang, T. Li, D. J. tweet and S. T. Hsu, Jpn. J. Appl. Phys., 38 (2000) L59.
- (2000) Jpn. J. Appl. Phys. , vol.38
- Zhang, F.¹ Li, T.² Tweet, D.J.³ Hsu, S.T.⁴

6
- 8644261413
- M. Miyake, K. Lee, S. Okamura and T. Shiosaki, Integrated Ferroelectrics, 36 (2001) 127.
- (2001) Integrated Ferroelectrics , vol.36 , pp. 127
- Miyake, M.¹ Lee, K.² Okamura, S.³ Shiosaki, T.⁴

7
- 0036314556
- M. Miyake, K. Lee, S. Kawasaki, Y. Ueda, S. Okamura and T. Shiosaki, Jpn. J. Appl. Phys., 41 (2002) 241.
- (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 241
- Miyake, M.¹ Lee, K.² Kawasaki, S.³ Ueda, Y.⁴ Okamura, S.⁵ Shiosaki, T.⁶

8
- 33746299900
- to be published
- Y. Ueda, N. Abe, Y. Otani, M. Miyake, S. Okamura and T. Shiosaki, Integrated Ferroelectrics, to be published.
- Integrated Ferroelectrics
- Ueda, Y.¹ Abe, N.² Otani, Y.³ Miyake, M.⁴ Okamura, S.⁵ Shiosaki, T.⁶

9
- 0033312889
- N. Wakiya, S. Nagata, M. Higuchi, K. Shinozaki and N. Mizutani, Jpn. J. Appl. Phys., 38 (1999) 5326.
- (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 5326
- Wakiya, N.¹ Nagata, S.² Higuchi, M.³ Shinozaki, K.⁴ Mizutani, N.⁵

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