Methods and characterization of pick and place microassembly

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2006, Pages

  Subramaniam, V ^a   Last, M E ^a   Pister, K S J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT RESISTANCE; DEGREES OF FREEDOM (MECHANICS); ELECTROSTATICS; MEMS; MICROMANIPULATORS; MICROSTRUCTURE;

FOUR-POINT MEASUREMENT; PICK-AND-PLACE; THERMAL ACTUATOR;

SELF ASSEMBLED MONOLAYERS;

EID: 85196535602     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2006-15043     Document Type: Conference Paper

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