Microelectromechanical high-density energy storage/rapid release system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3876, Issue , 1999, Pages 212-222

  Rodgers, M Steven ^a   Allen, Jim J ^a   Meeks, Kent D ^a   Jensen, Brian D ^a   Miller, Sam L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; ELECTROSTATIC DEVICES; MATHEMATICAL MODELS; MICROACTUATORS; SCANNING ELECTRON MICROSCOPY; SILICON; SURFACE TENSION;

MICROELECTROMECHANICAL HIGH DENSITY ENERGY STORAGE; MICROENGINE; MICROTRANSMISSION; RAPID RELEASE SYSTEM;

MICROELECTROMECHANICAL DEVICES;

EID: 0033337624     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)