The design and analysis of compliant MEMS using the pseudo-rigid-body model

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 62, Issue , 1997, Pages 119-126

  Jensen, Brian D ^a   Howell, Larry L ^a   Gunyan, Daniel B ^a   Salmon, Linton G ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; ELASTICITY; MACHINE DESIGN; MATHEMATICAL MODELS;

LINEAR BEAM THEORY; NONLINEAR DEFLECTIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031358864     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (22)

1. Ananthasuresh, G. K., Kota, S., and Gianchandani, Y., 1994, "A Methodical Approach to the Design of Compliant Micromechanisms," 1994 IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, pp. 189-192.
2. Ananthasuresh, G. K. and Kota, S., 1995, "Designing Compliant Mechanism," Mechanical Engineering, Vol. 117, No. 11, pp. 93-96.
3. Ananthasuresh, G. K., and Kota, S., 1996, "The Role of Compliance in the Design of MEMS," Proceedings of the 1996 ASME Design Engineering Technical Conferences, 96-DETC/MECH-1309.
4. Artobolevskii, I.I., 1986, Mechanisms in Modern Engineering Design: A Handbook for Engineers, Designers, and Inventors, Mir Publishers, Moscow.
5. Bathe, K.-J., and Bolourch, S., "Large-Displacement Analysis of Three-Dimensional Structures," International Journal for Numerical Methods in Engineering, Vol. 14, pp. 961-986.
6. Bisshopp, K.E. and D.C. Drucker, 1945, "Large Deflection of Cantilever Beams," Quarterly of Applied Mathematics, Vol. 3, pp. 272-275.
7. Burns, R.H., and Crossley, F.R.E., 1968, "Kinetostatic Synthesis of Flexible Link Mechanisms," ASME Paper No. 68-Mech-36.
8. Derderian, J.M., Howell, L.L., Murphy, M.D., Lyon, S.M., and Pack, S.D., "Compliant Parallel-Guiding Mechanisms," Proceedings of the 1996 ASME Mechanisms Conference, Paper 96-DETC/MECH-1208.
9. Frisch-Fay, R., 1962, Flexible Bars, Butterworth, Washington, D.C., 1962.
10. Gorski, W., 1976, "A Review of Literature and a Bibliography on Finite Elastic Deflections of Bars," Transactions of the Institution of Engineers, Australia, Civil Engineering Transactions, Vol. 18, No. 2, pp. 74-85.
11. Howell, L.L. and Midha, A., 1994a, "A Method for the Design of Compliant Mechanisms with Small-Length Flexural Pivots," ASME Journal of Mechanical Design, Vol. 116, No. 1, pp. 280-290.
12. Howell, L.L., and Midha, A., 1994b, "The Development of Force-Deflection Relationships for Compliant Mechanisms," Machine Elements and Machine Dynamics, DE-Vol. 71, 23rd ASME Biennial Mechanisms Conference, pp. 501-508.
13. Howell, L.L., and Midha, A., 1995, "Parametric Deflection Approximations for End-Loaded, Large-Deflection Beams in Compliant Mechanisms," ASME Journal of Mechanical Design, Vol. 117, No. 1, pp. 156-165.
14. Howell, L.L., and Midha, A., 1996, "Parametric Deflection Approximations for Initially Curved, Large-Deflection Beams in Compliant Mechanisms," Proceedings of the 1996 ASME Design Engineering Technical Conferences, 96-DETC/MECH-1215.
15. Howell, L.L., Midha, A., and Norton, T.W., 1996, "Evaluation of Equivalent Spring Stiffness for Use in a Pseudo-Rigid-Body Model of Large-Deflection Compliant Mechanisms," ASME Journal of Mechanical Design, Vol. 118, No. 1, pp. 126-131.
16. Midha, A., Her, I., and Salamon, B.A., 1992, "A Methodology for Compliant Mechanisms Design: Part I - Introduction and Large-Deflection Analysis," Advances in Design Automation, (Ed.: D.A.Hoeltzel), DE-Vol. 44-2, 18th ASME Design Automation Conference, pp. 29-38.
17. Mehregany, M., and Dewa, A.S., 1993, Introduction to Microelectromechanical Systems and the Multiuser MEMS Process, Case Western Reserve University, Cleveland, OH.
18. Salmon, L.G., Gunyan, D.B., Derderian, J.M., Opdahl, P.C., and Howell, L.L., 1996, "Use of the Pseudo-Rigid Body Model to Simplify the Description of Compliant Micro-Mechanisms," 1996 IEEE Solid-State and Actuator Workshop, Hilton Head Island, SC, pp. 136- 139.
19. Shoup, T.E., and McLarnan, C.W., 1971, "On the Use of the Undulating Elastica for the Analysis of Flexible Link Devices," Journal of Engineering for Industry, Trans. ASME, pp. 263-267.
20. Tang, W.C., Nguyen, T-C.H., and Howe, R.T., 1989, "Laterally Driven Polysilicon Resonant Microstructures," Sensors and Actuators, Vol. 20, No. 1-2, pp. 25-32.
21. Winter, S.J., and Shoup, T.E., 1972, "The Displacement Analysis of Path Generating Flexible-Link Mechanisms," Mechanism and Machine Theory, Vol. 7, No. 4, pp. 443-451.
22. Yang, T.Y., 1973, "Matrix Displacement Solution to Elastica Problems of Beams and Frames," International Journal of Solids and Structures, Vol. 9, No. 7, pp. 829-842.