Invar electrodeposition for MEMS application

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2879, Issue , 1996, Pages 252-259

  Hirano, Toshiki ^a   Fan, Long Sheng ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INVAR FILMS; THERMAL COEFFICIENT OF EXPANSION;

ELECTRODEPOSITION; FABRICATION; METALLIC FILMS; MICROSTRUCTURE; OPTIMIZATION; THERMAL EXPANSION;

MICROELECTROMECHANICAL DEVICES;

EID: 0030405949     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)