Analysis of mode-split operation in MEMS based on piezoresistive nanogauges

Journal of Microelectromechanical Systems

Volumn 24, Issue 1, 2015, Pages 174-181

  Langfelder, Giacomo ^a   Dellea, Stefano ^a   Berthelot, Audrey ^b   Rey, Patrice ^b   Tocchio, Alessandro ^c   Longoni, Antonio Francesco ^a  

^a POLITECNICO DI MILANO   (Italy)

^b DIF   (France)

^c STMICROELECTRONICS   (Italy)

Author keywords

microelectromechanical system (MEMS) inertial sensors; Piezoresistive sensing; resonant modes

Indexed keywords

ELECTROMECHANICAL DEVICES; MEMS; MICROMECHANICS;

CAPACITIVE READOUT; FABRICATION PROCESS; INERTIAL SENSOR; MICROELECTROMECHANICAL SYSTEM SENSORS; NON-UNIFORMITIES; PIEZORESISTIVE SENSING; RESONANT MODE; THEORETICAL MODELING;

CAPACITIVE SENSORS;

EID: 85027955933     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2014.2324032     Document Type: Article

References (20)

1. P. Robert et al., "M&NEMS: A new approach for ultra-low cost 3D inertial sensor," in Proc. IEEE Sensors Conf., Christchurch, New Zealand, Oct. 2009, pp. 963-966.
2. A. Walther, C. Le Blanc, N. Delorme, Y. Deimerly, R. Anciant, and J. Willemin, "Bias contributions in a MEMS tuning fork gyroscope," J. Microelectromech. Syst., vol. 22, no. 2, pp. 303-308, Apr. 2013.
3. A. Walther et al., "3-axis gyroscope with Si nanogage piezo-resistive detection," in Proc. IEEE MEMS Conf., Paris, France, Jan./Feb. 2012, pp. 480-483.
4. G. Langfelder, S. Dellea, F. Zaraga, D. Cucchi, and M. A. Urquia, "The dependence of fatigue in microelectromechanical systems on the environment and the industrial packaging," IEEE Trans. Ind. Electron., vol. 59, no. 12, pp. 4938-4948, Dec. 2012.
5. V. Kempe, "Gyroscopes," in Inertial MEMS Principles and Practice. Cambridge, U.K.: Cambridge Univ. Press, 2011, Ch. 8.
6. C. Acar, A. R. Schofield, A. A. Trusov, L. E. Costlow, and A. M. Shkel, "Environmentally robust MEMS vibratory gyroscopes for automotive applications," IEEE Sensors J., vol. 9, no. 12, pp. 1895-1906, Dec. 2009.
7. G. Langfelder and A. Tocchio, "Operation of Lorentz-force MEMS magnetometers with a frequency offset between driving current and mechanical resonance," IEEE Trans. Magn., vol. 50, no. 1, p. 4700106, Jan. 2014.
8. G. Langfelder, P. Minotti, G. Laghi, A. Tocchio, and A. Longoni, "Off-resonance, low-pressure operation of Lorentz force MEMS magnetometers," IEEE Trans. Ind. Electron., to be published, doi: 10.1109/TIE.2014.2317153.
9. S. E. Alper and T. Akin, "A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate," J. Microelectromech. Syst., vol. 14, no. 4, pp. 707-717, Aug. 2005.
10. N. Yazdi, F. Ayazi, and K. Naja, "Micromachined inertial sensors," Proc. IEEE, vol. 86, no. 8, p. 16401659, Aug. 1998.
11. A. A. Trusov, A. R. Schofield, and A. M. Shkel, "Gyroscope architecture with structurally forced anti-phase drive-mode and linearly coupled anti-phase sense-mode," in Proc. IEEE Transducers Solid-State Sens., Actuators, Microsyst. Conf., Denver, CO, USA, Jun. 2009, pp. 660-663.
12. R. Neul et al., "Micromachined angular rate sensors for automotive applications," IEEE Sensors J., vol. 7, no. 2, pp. 302-309, Feb. 2007.
13. Z. Y. Guo, L. T. Lin, Q. C. Zhao, Z. C. Yang, H. Xie, and G. Z. Yan, "A lateral-axis microelectromechanical tuning-fork gyroscope with decoupled comb drive operating at atmospheric pressure," J. Microelectromech. Syst., vol. 19, no. 3, pp. 458-468, Jun. 2010.
14. D. Ettelt, P. Rey, G. Jourdan, A. Walther, P. Robert, and J. Delamare, "3D magnetic field sensor concept for use in inertial measurement units (IMUs)," J. Microelectromech. Syst., vol. 23, no. 2, pp. 324-333, Apr. 2014.
15. G. Langfelder, A. Longoni, A. Tocchio, and E. Lasalandra, "MEMS motion sensors based on the variations of the fringe capacitances," IEEE Sensors J., vol. 11, no. 4, pp. 1069-1077, Apr. 2011.
16. C. Buffa, A. Tocchio, and G. Langfelder, "A versatile instrument for the characterization of capacitive micro-and nanoelectromechanical systems," IEEE Trans. Instrum. Meas., vol. 61, no. 7, pp. 2012-2021, Jul. 2012.
17. ITMEMS s.r.l., Milano, Italy. (2014, May). MEMS Characterization Platform, MCP-A-04, Product Data-Sheet [Online]. Available: http://www.itmems.it
18. C. D. Ezekwe and B. E. Boser, "A mode-matching closed-loop vibratory-gyroscope readout interface with a 0.004°/s/ v Hz noise floor over a 50 Hz band," in Proc. ISSCC, 2008, pp. 580-581.
19. A. Sharma, M. F. Zaman, and F. Ayazi, "A sub-0.2 °/hr bias drift micromechanical silicon gyroscope with automatic CMOS mode-matching," IEEE J. Solid-State Circuits, vol. 44, no. 5, pp. 1593-1608, May 2009.
20. G. Langfelder, S. Dellea, P. Rey, A. Berthelot, and A. Longoni, "Investigation of the fatigue origin and propagation in submicrometric silicon piezoresistive layers," in Proc. IEEE MEMS Conf., San Francisco, CA, USA, Jan. 2014, pp. 640-643.