Bias contributions in a MEMS tuning fork gyroscope

Journal of Microelectromechanical Systems

Volumn 22, Issue 2, 2013, Pages 303-308

  Walther, Arnaud ^a   Le Blanc, Christophe ^b   Delorme, Nicolas ^b   Deimerly, Yannick ^a   Anciant, Romain ^a   Willemin, Jerome ^a  

^a CEA GRENOBLE   (France)

^b ASYGN SAS   (France)

Author keywords

Bias; microelectromechanical systems (MEMS) gyroscope

Indexed keywords

BIAS; LOCAL DISPERSION; LOCAL STANDARD DEVIATION; MECHANICAL PARTS; MECHANICAL STRUCTURES; MEMS TUNING FORK GYROSCOPE; MICRO ELECTROMECHANICAL SYSTEM (MEMS); OPTIMIZED DESIGNS;

DEFECTS; DISPERSIONS; ELECTROMECHANICAL DEVICES; ERRORS; MEMS; MICROMECHANICS;

GYROSCOPES;

EID: 84875804284     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2221158     Document Type: Article

References (11)

1. MEMS Accelerometer & Gyroscope and IMU Markets 2008-2013, Yole Développement, Lyon, France, 2008. [Online]. Available: http://www.yole.fr
2. M. Saukoski, L. Aaltonen, and K. Halonen, "Zero-rate output and quadrature compensation in vibratory MEMS gyroscopes," IEEE Sensors J., vol. 7, no. 12, pp. 1639-1652, Dec. 2007.
3. S. V. Iyer, "Modeling and Simulation of Non-Idealities in a Z-Axis CMOS-MEMS Gyroscope," Ph.D. dissertation, Dept. Elect. Comp Eng., Carnegie Mellon Univ., Pittsburgh, PA, 2003.
4. E. Tatar, S. E. Alper, and T. Akin, "Effect of quadrature error on the performance of a fully decoupled MEMS gyroscope," in Proc. IEEE MEMS, Cancun, Mexico, Jan. 23-27, 2011, pp. 569-572.
5. M. S. Weinberg and A. Kourepenis, "Error sources in in-plane silicon tuning-fork MEMS gyroscopes," J. Microelectromech. Syst., vol. 15, no. 3, pp. 479-491, Jun. 2006. (Pubitemid 43891342)
6. A. Walther, M. Savoye, G. Jourdan, P. Renaux, F. Souchon, P. Robert, C. Le Blanc, N. Delorme, O. Gigan, and C. Lejuste, "3 axis gyroscope with Si nanogage piezo-resistive detection," in Proc. IEEE MEMS, Paris, France, Jan. 29-Feb. 2, 2012, pp. 480-483.
7. P. Merz, W. Pilz, F. Senger, K. Reimer, M. Grouchko, T. Pandhumsoporn, W. Bosch, A. Cofer, and S. Lassig, "Impact of Si DRIE on vibratory MEMS gyroscope performances," in Proc. Transducers, Lyon, France, Jun. 10-14, 2007, pp. 1187-1190.
8. R. Neul, U. Gomez, K. Kehr, W. Bauer, J. Classen, C. Döring, E. Esch, S. Götz, J. Hauer, B. Kuhlmann, C. Lang, M. Veith, and R. Willig, "Micromachined gyros for automotive applications," in Proc. IEEE Sensors, Irvine, CA, Oct. 30-Nov. 3, 2005, pp. 527-530.
9. P. Y. Kwok, M. S. Weinberg, and K. S. Breuer, "Fluid effects in vibrating micromachined structures," J. Microelectromech. Syst., vol. 14, no. 4, pp. 770-781, Aug. 2005. (Pubitemid 41508707)
10. M. S. Rodgers, M. S. Burg, B. D. Jensen, S. L. Miller, and S. M. Barnes, "Compact electrostatic comb actuator," U.S. Patent 6 133 670, Oct. 17, 2000.
11. W. A. Clark, T. Juneau, and R. T. Howe, "Micromachined vibratory rate gyroscope," U.S. Patent 6 067 858, May 30, 2000.