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Volumn 2003-October, Issue , 2003, Pages 825-830

A feasibility study of a microaccelerometer with magnetorheological fluids

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; INTELLIGENT SYSTEMS; MAGNETORHEOLOGICAL FLUIDS; ROBOTICS; SIGNAL PROCESSING;

EID: 84990925749     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RISSP.2003.1285693     Document Type: Conference Paper
Times cited : (25)

References (14)
  • 3
    • 0035368926 scopus 로고    scopus 로고
    • Surface Micromachined Piezoelectric Accelerometers (PiXLs)
    • June
    • D. L., DeVoe and A. P. Pisano, "Surface Micromachined Piezoelectric Accelerometers (PiXLs)," Journal of Microelectromechanical Systems, vol. 10, no. 2, pp. 180-186, June 2001.
    • (2001) Journal of Microelectromechanical Systems , vol.10 , Issue.2 , pp. 180-186
    • DeVoe, D.L.1    Pisano, A.P.2
  • 4
    • 0037301513 scopus 로고    scopus 로고
    • Self-Balanced Navigation-Grade Capacitive Microaccelerometers Using Branched Finger Electrodes and Their Performance for Varying Sense Voltage and Pressure
    • Feb.
    • K. H. Han and Y. H. Cho, "Self-Balanced Navigation-Grade Capacitive Microaccelerometers Using Branched Finger Electrodes and Their Performance for Varying Sense Voltage and Pressure," Journal of Microelectromechanical Systems, vol. 12, no. 1, pp. 11-20, Feb. 2003.
    • (2003) Journal of Microelectromechanical Systems , vol.12 , Issue.1 , pp. 11-20
    • Han, K.H.1    Cho, Y.H.2
  • 6
    • 0032099624 scopus 로고    scopus 로고
    • Parametric Modeling of a Microaccelerometer: Comparing I- and D-Optimal Design of Experiments for Finite-Element Analysis
    • June
    • Y. B, Gianchandani, and S. B. Crary, "Parametric Modeling of a Microaccelerometer: Comparing I- and D-Optimal Design of Experiments for Finite-Element Analysis," Journal of Microelectromechanical Systems, vol. 7, no. 2, pp. 274-282, June 1998.
    • (1998) Journal of Microelectromechanical Systems , vol.7 , Issue.2 , pp. 274-282
    • Gianchandani, Y.B.1    Crary, S.B.2
  • 8
    • 0035441451 scopus 로고    scopus 로고
    • Comparison of Capacitive and Feedback-Interferometric Measurements on MEMS
    • Sep.
    • V. Annovazzi-Lodi, S. Merlo, and M. Norgia, "Comparison of Capacitive and Feedback-Interferometric Measurements on MEMS," Journal of Microelectromechanical Systems, vol. 10, no. 3, pp. 327-335, Sep. 2001.
    • (2001) Journal of Microelectromechanical Systems , vol.10 , Issue.3 , pp. 327-335
    • Annovazzi-Lodi, V.1    Merlo, S.2    Norgia, M.3
  • 10
    • 0032098210 scopus 로고    scopus 로고
    • A High-Sensitivity Z-Axis Capacitive Silicon Microaccelerometer with a Torsional Suspension
    • June
    • A. Selvakumar and K. Najafi, "A High-Sensitivity Z-Axis Capacitive Silicon Microaccelerometer with a Torsional Suspension, Journal of Microelectromechanical Systems, vol. 7, no. 2, pp. 192-200, June 1998.
    • (1998) Journal of Microelectromechanical Systems , vol.7 , Issue.2 , pp. 192-200
    • Selvakumar, A.1    Najafi, K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.