Effects of stress on formation of silicides on silicon-on-insulator wafers

2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings

Volumn 1, Issue , 2001, Pages 477-482

  Liu, C H ^a   Liew, S C ^a   Cheng, S L ^a   Chen, L J ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84966648391     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSICT.2001.981522     Document Type: Conference Paper

References (10)

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