Effects of stress on the growth of TiSi2 thin films on (001)Si

Applied Physics Letters

Volumn 74, Issue 10, 1999, Pages 1406-1408

  Cheng, S L ^a   Huang, H Y ^a   Peng, Y C ^a   Chen, L J ^a   Tsui, B Y ^b   Tsai, C J ^c   Guo, S S ^c  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^c NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000646569     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123565     Document Type: Article

References (9)

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