Diamond microelectromechanical sensors for pressure and acceleration sensing

2001 Microelectromechanical Systems Conference, MEMS 2001

Volumn , Issue , 2002, Pages 45-49

  Holmes, K C ^a   Davidson, J L ^a   Kang, W P ^a   Stemberg, A L ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; DIAMONDS; ELECTROMECHANICAL DEVICES; FABRICATION; MEMS; MICROMECHANICS; SEMICONDUCTOR DEVICES; SUBSTRATES;

ACCELERATION SENSING; ACCELEROMETER SENSOR; CHEMICAL VAPOR DEPOSITION DIAMOND; DIAMOND SUBSTRATES; EXTREME ENVIRONMENT; MICRO-ELECTRO-MECHANICAL; MICROELECTROMECHANICAL SENSORS; SEMICONDUCTOR DEVICE FABRICATION;

WIDE BAND GAP SEMICONDUCTORS;

EID: 84963829746     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSC.2001.992739     Document Type: Conference Paper

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