MEMS, microengineering and aerospace systems

30th Fluid Dynamics Conference

Volumn , Issue , 1999, Pages

  Janson, S W ^a   Helvajian, H ^a   Breuer, K ^b  

^a AEROSPACE CORPORATION   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES; MEMS; MICROELECTRONIC PROCESSING; MICROELECTRONICS;

AEROSPACE SYSTEMS; MEMS (MICROELECTROMECHANICAL SYSTEMS); MICRO-ENGINEERING; MICRO-ENGINEERING TECHNOLOGY; MICRO-PROPULSION SYSTEMS; POWER REQUIREMENT; PROCESSING TECHNOLOGIES; SCIENCE AND ENGINEERING;

FLUID DYNAMICS;

EID: 84963784349     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2514/6.1999-3802     Document Type: Conference Paper

References (69)

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