Viscous effects in supersonic MEMS-fabricated micronozzles

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 117-123

  Bayt, Robert L ^a   Breuer, Kenneth S ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY LAYER FLOW; COMPUTER SIMULATION; MASS TRANSFER; MATHEMATICAL MODELS; NAVIER STOKES EQUATIONS; NOZZLES; REACTIVE ION ETCHING; REYNOLDS NUMBER; SUPERSONIC FLOW; VISCOUS FLOW;

DEEP REACTIVE ION ETCHING (DRIE); SUPERSONIC MICRONOZZLES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032303026     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)