High sensitivity capacitive microaccelerometer with a folded-electrode structure

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 600-605

  Yazdi, Navid ^a   Salian, Arvind ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC NOISE; CAPACITANCE MEASUREMENT; DAMPING; ELECTRODES; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; SILICON SENSORS;

CAPACITIVE MICROACCELERATORS;

ACCELEROMETERS;

EID: 0032688947     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)