Nanotube mechanical resonators with quality factors of up to 5 million

Nature Nanotechnology

Volumn 9, Issue 12, 2014, Pages 1007-1011

  Moser, J ^a   Eichler, A ^a,c   Guttinger J ^a   Dykman, M I ^b   Bachtold, A ^a  

^a ICFO INSTITUT DE CIENCIES FOTONIQUES   (Spain)

^b MICHIGAN STATE UNIVERSITY   (United States)

^c ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; NATURAL FREQUENCIES; YARN;

ELECTROSTATIC ENVIRONMENTS; HIGH QUALITY FACTORS; MECHANICAL RESONATORS; NANOTUBE RESONATORS; QUALITY FACTORS; ULTRA LOW NOISE; ULTRA SENSITIVES; VIBRATIONAL STATE;

RESONATORS;

CARBON NANOTUBE;

ARTICLE; DEVICES; MASS; NANOTUBE MECHANICAL RESONATOR; NOISE; PRIORITY JOURNAL; REDUCTION; STATIC ELECTRICITY; SURFACE PROPERTY; TEMPERATURE; VIBRATION;

EID: 84961290660     PISSN: 17483387     EISSN: 17483395     Source Type: Journal    
DOI: 10.1038/nnano.2014.234     Document Type: Article

References (33)

1. Chaste, J. et al. A nanomechanical mass sensor with yoctogram resolution. Nature Nanotech. 7, 301-304 (2012).
2. Steele, G. A. et al. Strong coupling between single-electron tunneling and nanomechanical motion. Science 325, 1103-1107 (2009).
3. Lassagne, B., Tarakanov, Y., Kinaret, J., Garcia-Sanchez, D. & Bachtold, A. Coupling mechanics to charge transport in carbon nanotube mechanical resonators. Science 325, 1107-1110 (2009).
4. Benyamini, A., Hamo, A., Viola Kusminskiy, S., von Oppen, F. & Ilani, S. Realspace tailoring of the electron-phonon coupling in ultra-clean nanotube mechanical resonators. Nature Phys. 10, 151-156 (2014).
5. Adiga, V. P. et al. Approaching intrinsic performance in ultra-thin silicon nitride drum resonators. J. Appl. Phys. 112, 4323 (2012).
6. Poot, M. & van der Zant, H. S. J. Mechanical systems in the quantum regime. Phys. Rep. 511, 273-335 (2012).
7. Li, M., Tang, H. X. & Roukes, M. L. Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications. Nature Nanotech. 2, 114-120 (2007).
8. Mahboob, I. & Yamaguchi, H. Bit storage and bit flip operations in an electromechanical oscillator. Nature Nanotech. 3, 275-279 (2008).
9. Aspelmeyer, M., Meystre, P. & Schwab, K. Quantum optomechanics. Phys. Today 65, 29 (July, 2012).
10. Rieger, J., Isacsson, A., Seitner, M. J., Kotthaus, J. P. &Weig, E. M. Energy losses of nanomechanical resonators induced by atomic force microscopy-controlled mechanical impedance mismatching. Nature Commun. 5, 3345 (2014).
11. Tao, Y., Boss, J. M., Moores, B. A. & Degen, C. L. Single crystal diamond nanomechanical resonators with quality factors exceeding one million. Nature Commun. 5, 3638 (2014).
12. Chan, J., Safavi-Naeini, A. H., Hill, J. T., Meenehan, S. & Painter, O. Optimized optomechanical crystal cavity with acoustic radiation shield. Appl. Phys. Lett. 101, 081115 (2012).
13. Anetsberger, G., Rivière, R., Schliesser, A., Arcizet, O. & Kippenberg, T. J. Ultralow-dissipation optomechanical resonators on a chip. Nature Photon. 2, 627-633 (2008).
14. Chan, J. et al. Laser cooling of a nanomechanical oscillator into its quantum ground state. Nature 478, 89-92 (2011).
15. Ni, K-K. et al. Enhancement of mechanical Q factors by optical trapping. Phys. Rev. Lett. 108, 214302 (2012).
16. Gieseler, J., Deutsch, B., Quidant, R. & Novotny, L. Subkelvin parametric feedback cooling of a laser-trapped nanoparticle. Phys. Rev. Lett. 109, 103603 (2012).
17. Gröblacher, S. et al. Demonstration of an ultracold micro-optomechanical oscillator in a cryogenic cavity. Nature Phys. 5, 485-488 (2009).
18. Villanueva, L. G. & Schmid, S. Evidence of surface loss as ubiquitous limiting damping mechanism in SiN micro-and nanomechanical resonators. Preprint at http://arxiv.org/pdf/1405.6115 (2014).
19. Meerwaldt, H. B., Johnston, S. R., van der Zant, H. S. J. & Steele, G. A. Submicrosecond-timescale readout of carbon nanotube mechanical motion. Appl. Phys. Lett. 103, 053121 (2013).
20. Gouttenoire, V. et al. Digital and FM demodulation of a doubly clamped singlewalled carbon-nanotube oscillator: towards a nanotube cell phone. Small 6, 1060-1065 (2010).
21. Eichler, A. et al. Nonlinear damping in mechanical resonators made from carbon nanotubes and graphene. Nature Nanotech. 6, 339-342 (2011).
22. Moser, J. et al. Ultrasensitive force detection with a nanotube mechanical resonator. Nature Nanotech. 8, 493-496 (2013).
23. Ganzhorn, M. & Wernsdorfer, W. Dynamics and dissipation induced by singleelectron tunneling in carbon nanotube nanoelectromechanical systems. Phys. Rev. Lett. 108, 175502 (2012).
24. Gavartin, E., Verlot, P & Kippenberg, T. J. Stabilization of a linear nanomechanical oscillator to its thermodynamic limit. Nature Commun. 4, 2860 (2013).
25. Fong, K. Y., Pernice, W. H. P. & Tang, H. X. Frequency and phase noise of ultrahigh Q silicon nitride nanomechanical resonators. Phys. Rev. B 85, 161410(R) (2012).
26. Villanueva, L. G. et al. Surpassing fundamental limits of oscillators using nonlinear resonators. Phys. Rev. Lett. 110, 177208 (2013).
27. Dykman, M. I. & Krivoglaz, M. A. Theory of nonlinear oscillator interacting with a medium. Sov. Phys. Rev. 5, 265-441 (1984).
28. Eichler, A., Moser, J., Dykman, M. I. & Bachtold, A. Symmetry breaking in a mechanical resonator made from a carbon nanotube. Nature Commun. 4, 2843 (2013).
29. Barnard, A.W., Sazonova, V., van der Zande, A. M. & McEuen, P. L. Fluctuation broadening in carbon nanotube resonators. Proc. Natl Acad. Sci. USA 109, 19093 (2012).
30. Longenecker, J. G. et al. High-gradient nanomagnets on cantilevers for sensitive detection of nuclear magnetic resonance. ACS Nano 6, 9637-9645 (2012).
31. Laird, E. A., Pei, F., Tang, W., Steele, G. A. & Kouwenhoven, L. P. A high quality factor carbon nanotube mechanical resonator at 39 GHz. Nano Lett. 12, 193-197 (2012).
32. Schneider, B. H., Etaki, S., van der Zant, H. S. J. & Steele, G. A. Coupling carbon nanotube mechanics to a superconducting circuit. Sci. Rep. 2, 599 (2012).
33. Cleland, A. N. & Roukes, M. L. Noise processes in nanomechanical resonators. J. Appl. Phys. 92, 2758-2769 (2002).