Highly inclined electrodeposited metal lines using an excimer laser patterning technique

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1469-1472

  Choi, Yoonsu ^a   Choi, Seong O ^a   Shafer, Richard H ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

3 D MEA; Excimer laser; Parylene; SU 8

Indexed keywords

ARRAYS; ELECTRODEPOSITION; ELECTRODES; ELECTROPLATING; EXCIMER LASERS; MICROELECTROMECHANICAL DEVICES; SIGNAL DETECTION; SUBSTRATES; THREE DIMENSIONAL;

CONFORMAL COATINGS; PARYLENE; SU-8; THREE-DIMENSIONAL (3-D) MULTI-ELECTRODE ARRAYS (MEA);

ELECTRIC SIGNAL SYSTEMS;

EID: 27544477851     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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