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Volumn 390-391, Issue 1, 2009, Pages 696-700
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Removal of carbon films by oxidation in narrow gaps: Thermo-oxidation and plasma-assisted studies
a
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS HYDROGENATED CARBON (A-C:H) FILMS;
BRUSH STRUCTURES;
CONTROLLED FUSIONS;
DEPOSITED FILMS;
DEPOSITED LAYERS;
NARROW GAPS;
PLASMA-ASSISTED CHEMICAL VAPOR DEPOSITIONS;
SIDE WALLS;
STAINLESS STEEL PLATES;
THERMAL OXIDATIONS;
THERMO OXIDATIONS;
AMORPHOUS CARBON;
AMORPHOUS FILMS;
CARBON NANOTUBES;
DIRECT ENERGY CONVERSION;
FUSION REACTORS;
GLOW DISCHARGES;
HELIUM;
OXIDATION;
OXYGEN;
PLASMA DEPOSITION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASMA ETCHING;
PLASMAS;
PLATES (STRUCTURAL COMPONENTS);
STAINLESS STEEL;
CARBON FILMS;
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EID: 67349179970
PISSN: 00223115
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnucmat.2009.01.192 Document Type: Article |
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Times cited : (24)
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References (14)
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