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Surface and Coatings Technology

Volumn 205, Issue SUPPL. 2, 2011, Pages

Carbon layers cleaning from inside of narrow gaps by a RF glow discharge

(4) Stancu, C a Teodorescu, M a Galca, A C b Dinescu, G a

a NATIONAL INSTITUTE FOR LASER (Romania)

b NATIONAL INSTITUTE OF MATERIALS PHYSICS (Romania)

Author keywords

Discharges in gaps; Plasma cleaning; Radiofrequency discharges

Indexed keywords

CLEANING; GLOW DISCHARGES; CARBON; PLASMAS; AMORPHOUS CARBON;

CLEANING EFFECTIVENESS; DISCHARGE POWER; HYDROGENATED AMORPHOUS CARBON; INTERMEDIATE PRESSURES; LARGE SURFACES; PLASMA CLEANING; RADIO FREQUENCY DISCHARGES; RF GLOW DISCHARGE; CARBON LAYERS; NARROW GAP;

AMORPHOUS CARBON; CLEANING;

EID: 79959797161 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2011.03.090 Document Type: Article

Times cited : (1)

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