Toward efficient Cu(In,Ga)Se2 solar cells prepared by reactive magnetron co-sputtering from metallic targets in an Ar:H2Se atmosphere

Progress in Photovoltaics: Research and Applications

Volumn 23, Issue 12, 2015, Pages 1793-1805

  Schulte, Jonas ^a   Harbauer, Karsten ^a   Ellmer, Klaus ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Cu content; Cu(In,Ga)Se2; hydrogen selenide (H2Se); Na doping; reactive magnetron sputtering; solar cells

Indexed keywords

DEPOSITION; FILM PREPARATION; GALLIUM; INDIUM; REACTIVE SPUTTERING; SEMICONDUCTING SELENIUM COMPOUNDS; SEMICONDUCTOR DOPING; SODIUM; SOLAR CELLS; SOLAR POWER GENERATION; SPUTTER DEPOSITION;

CU (IN ,GA)SE; CU CONTENT; NA DOPING; REACTIVE MAGNETRON SPUTTERING; SELENIDES;

COPPER;

EID: 84957962192     PISSN: 10627995     EISSN: 1099159X     Source Type: Journal    
DOI: 10.1002/pip.2622     Document Type: Article

References (46)

1. Green MA, Emery K, Hishikawa Y, Warta W, Dunlop ED,. Solar cell efficiency tables (version 44). Progress in Photovoltaics: Research and Applications 2014; 22 (7): 701-710. DOI: 10.1002/pip.2525.
2. 2 thin films. Applied Physics A 2006; 82: 1-7.
3. 2 cells and modules. Solar Energy Mat. Solar Cells 2013; 119: 51-58.
4. Karg F,. High efficiency CIGS solar modules, Proceedings of the International Conference on Materials for Advanced Technologies 2011, Symposium O, 2012; 275-282. DOI: 10.1016/j.egypro.2012.02.032
5. Probst V, Stetter W, Riedl W, Vogt H, Wendl M, Calwer H, Zweigart S, Ufert KD, Freienstein B, Cerva H, Karg FH,. Rapid CIS-process for high efficiency PV-modules: development towards large area processing. Thin Solid Films 2001; 387 (1-2): 262-267. DOI: 10.1016/S0040-6090(00)01800-9.
6. Mellikov E, Meissner D, Varema T, Altosaar M, Kauk M, Volobujeva O, Raudoja J, Timmo K, Danilson M,. Monograin materials for solar cells. Solar Energy Materials and Solar Cells 2009; 93 (1): 65-68. DOI: 10.1016/j.solmat.2008.04.018.
7. Ellmer K,. In Low Temperature Plasmas. Fundamentals, Technologies and Techniques, Vol. 2, Hippler R, Kersten H, Schmidt M, Schoenbach KH, (eds). Wiley-VCH: Berlin, 2008; 675-715.
8. Thornton JA, Cornog DG, Hall RB, Shea SP, Meakin JD,. Reactive sputtered copper indium diselenide films for photovoltaic applications. Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films 1984; 2 (2): 307-311. DOI: 10.1116/1.572589.
9. Thornton JA, Lommasson TC,. Magnetron reactive sputtering of copper indium selenide. Solar Cells 1986; 16 (1-4): 165-180. DOI: 10.1016/0379-6787(86)90082-7.
10. 2. Solar Cells 1988; 24 (1-2): 1-9. DOI: 10.1016/0379-6787(88)90030-0.
11. Thornton JA,. Fundamental processes in sputtering of relevance to the fabrication of thin film solar cells. Solar Cells 1987; 21: 41-54.
12. 2 solar cells prepared by reactive magnetron sputtering. Applied Physics Letters 2006; 88: 213502-1...3.
13. Nakamura E, Ueno K, Ohta J, Fujioka H, Oshima M,. Dramatic reduction in process temperature of InGaN-based light-emitting diodes by pulsed sputtering growth technique. Applied Physics Letters 2014; 104 (5):. DOI: 10.1063/1.4864283.
14. 2 film in reactive sputtering process. Progress in Photovoltaics 2012; 20 (7): 899-903. DOI: 10.1002/Pip.1202.
15. Posada J, Jubault M, Bousquet A, Tomasella E, Lincot D,. In-situ optical emission spectroscopy for a better control of hybrid sputtering/evaporation process for the deposition of Cu(In,Ga)Se2 layers. Thin Solid Films. DOI: 10.1016/j.tsf.2014.09.072
16. 2 absorbers without extra Se supply. Solar Energy Materials and Solar Cells 2012; 103: 25-29. DOI: 10.1016/j.solmat.2012.04.008.
17. Kong SM, Fan R, Jung SH, Chung CW,. Characterization of Cu(In,Ga)Se-2 thin films prepared by RF magnetron sputtering using a single target without selenization. Journal of Industrial and Engineering Chemistry 2013; 19 (4): 1320-1324. DOI: 10.1016/j.jiec.2012.12.035.
18. Liu J, Zhuang DM, Luan HX, Cao MJ, Xie M, Li XL,. Preparation of Cu(In,Ga)Se-2 thin film by sputtering from Cu(In,Ga)Se-2 quaternary target. Progress in Natural Science-Materials International 2013; 23 (2): 133-138. DOI: 10.1016/j.pnsc.2013.02.006.
19. th European Photovoltaic Solar Energy Conference, Frankfurt, Germany, 2012; 2784-2786. DOI: 10.4229/27thEUPVSEC2012-3DV.3.19
20. www.midsummer.se, press release, Accessed: 13 May 2014.
21. www.miasole.com., press release, Accessed: 24 May 2012.
22. Ellmer K, Hinze J, Klaer J,. Copper indium disulfide solar cell absorbers prepared in a one-step process by reactive magnetron sputtering from copper and indium targets. Thin Solid Films 2002; 413 (1-2): 92-97. DOI: 10.1016/S0040-6090(02)00355-3.
23. Mikikian M, Boufendi L,. Experimental investigations of void dynamics in a dusty discharge. Physics of Plasmas 2004; 11 (8): 3733-3737. DOI: 10.1063/1.1761578.
24. Berg S, Nyberg T,. Fundamental understanding and modeling of reactive sputtering processes. Thin Solid Films 2005; 476 (2): 215-230. DOI: 10.1016/j.tsf.2004.10.051.
25. Musil J, Baroch P, Vlcek J, Nam KH, Han JG,. Reactive magnetron sputtering of thin films: present status and trends. Thin Solid Films 2005; 475 (1-2): 208-218. DOI: 10.1016/j.tsf.2004.07.041.
26. Hofmann S,. Target and substrate surface reaction kinetics in magnetron sputtering of nitride coatings. Thin Solid Films 1990; 191 (2): 335-348. DOI: 10.1016/0040-6090(90)90384-P.
27. Thornton JA,. High rate thick film growth. Annual Review of Materials Science 1977; 7: 239-260. DOI: 10.1146/annurev.ms.07.080177.001323.
28. Barreau N, Painchaud T, Couzinie-Devy F, Arzel L, Kessler J,. Recrystallization of CIGSe layers grown by three-step processes: a model based on grain boundary migration. Acta Materialia 2010; 58 (17): 5572-5577. DOI: 10.1016/j.actamat.2010.06.025.
29. 2 thin-film formation during the multi-stage co-evaporation process. Progress in Photovoltaics 2013; 21 (1): 30-46. DOI: 10.1002/Pip.1233.
30. 2 by multisource physical vacuum evaporation. Advanced Materials 1993; 5 (2): 114-119. DOI: 10.1002/adma.19930050209.
31. 2. Journal of Thermal Analysis 1986; 31 (3): 589-595.
32. Ruckh M, Kessler J, Oberacker TA, Schock HW,. Thermal-decomposition of ternary chalcopyrite thin-films. Japanese Journal of Applied Physics 1993; 32: 65-67. DOI: 10.7567/JJAPS.32S3.65.
33. Jackson SC, Baron BN, Rocheleau RE, Russell TWF,. A chemical-reaction model for physical vapor-deposition of compound semiconductor films. Alche Journal 1987; 33 (5): 711-721. DOI: 10.1002/aic.690330503.
34. 2 solar cells by reactive magnetron sputtering. Applied Physics Letters 2006; 88 (21): 213502. DOI: 10.1063/1.2205756
35. Jackson P, Hariskos D, Wuerz R, Wischmann W, Powalla M,. Compositional investigation of potassium doped Cu(In,Ga)Se-2 solar cells with efficiencies up to 20.8%. Physica Status Solidi-Rapid Research Letters 2014; 8 (3): 219-222. DOI: 10.1002/pssr.201409040.
36. 2 thin-film solar-cells with improved performance. Conference Record of the Twenty Third Ieee Photovoltaic Specialists Conference 1993; 364-371. DOI: 10.1109/Pvsc.1993.347154
37. Siebentritt S, Gutay L, Regesch D, Aida Y, Depredurand V,. Why do we make Cu(In,Ga)Se-2 solar cells non-stoichiometric? Solar Energy Materials and Solar Cells 2013; 119: 18-25. DOI: 10.1016/j.solmat.2013.04.014.
38. Contreras MA, Mansfield LM, Egaas B, Li J, Romero M, Noufi R, Rudiger-Voigt E, Mannstadt W,. Wide bandgap Cu(In,Ga)Se-2 solar cells with improved energy conversion efficiency. Progress in Photovoltaics 2012; 20 (7): 843-850. DOI: 10.1002/Pip.2244.
39. 2 thin films for high-efficiency solar cells. Nature Materials 2013; 12 (12): 1107-1111. DOI: 10.1038/nmat3789.
40. 2 solar cells. Applied Physics Letters 2008; 93 (2): 022110. DOI: 10.1063/1.2957983
41. 2 thin films grown with a Cu-poor/rich/poor sequence: growth model and structural considerations. Progress in Photovoltaics 2003; 11 (5): 319-331. DOI: 10.1002/Pip.495.
42. 3 precursor films. Applied Physics Letters 1994; 65 (2): 198-200. DOI: 10.1063/1.112670.
43. Rudmann D, Bremaud D, Zogg H, Tiwari AN,. Na incorporation into Cu(In,Ga)Se-2 for high-efficiency flexible solar cells on polymer foils. Journal of Applied Physics 2005; 97 (8):. DOI: 10.1063/1.1857059.
44. 2 thin film solar cells. Solar Energy Materials and Solar Cells 2000; 60 (3): 279-293. DOI: 10.1016/S0927-0248(99)00089-6.
45. Laemmle A, Wuerz R, Powalla M,. Efficiency enhancement of Cu(In,Ga)Se-2 thin-film solar cells by a post-deposition treatment with potassium fluoride. Physica Status Solidi-Rapid Research Letters 2013; 7 (9): 631-634. DOI: 10.1002/pssr.201307238.
46. Schulte J, Harbauer K, Ellmer K,. Reactive magnetron co-sputtering of Cu(In,Ga)Se2 absorber layers by a 2-stage process: role of substrate type and Na-doping. Thin Solid Films 2014. DOI: 10.1016/j.tsf.2014.10.089.