SCOPUS 정보 검색 플랫폼

Volumn 582, Issue , 2015, Pages 279-283

In-situ optical emission spectroscopy for a better control of hybrid sputtering/evaporation process for the deposition of Cu(In,Ga)Se2layers

(5) Posada, Jorge a Jubault, Marie a Bousquet, Angélique b Tomasella, Eric b Lincot, Daniel a

a CNRS (France)

b UNIVERSITÉ CLERMONT AUVERGNE (France)

Author keywords

Cu(In,Ga)Se2; Hybrid process; Optical emission spectroscopy; Photovoltaics; Plasma species; Sputtering; Target poisoning

Indexed keywords

COPPER METALLOGRAPHY; LIGHT EMISSION; MORPHOLOGY; OPTICAL EMISSION SPECTROSCOPY; SELENIUM; SELENIUM COMPOUNDS; SPUTTERING; STRUCTURE (COMPOSITION); THERMAL EVAPORATION; THIN FILM SOLAR CELLS; THIN FILMS;

CU(IN , GA)SE2; ENERGY DISPERSIVE X-RAY; EVAPORATION TEMPERATURE; HYBRID PROCESS; PHOTOVOLTAICS; PLASMA SPECIES; STRUCTURE AND MORPHOLOGY; THIN FILM COMPOSITION;

PROCESS CONTROL;

EID: 84926518681 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2014.09.072 Document Type: Conference Paper

Times cited : (12)

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