Effect of Se flux on CuIn 1-xGa xSe 2 film in reactive sputtering process

Progress in Photovoltaics: Research and Applications

Volumn 20, Issue 7, 2012, Pages 899-903

  Park, Nae Man ^a   Lee, Ho Sub ^a,b   Cho, Dae Hyung ^a   Chung, Yong Duck ^a   Kim, Kyung Hyun ^a   Lee, Kyu Seok ^a   Kim, Jeha ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b Dankook University   (South Korea)

Author keywords

chalcopyrite; Cu(In,Ga)Se2; metal target; reactive sputtering; solar cell; sub micron thin film

Indexed keywords

CHALCOPYRITE; CIGS FILMS; CIGS SOLAR CELLS; CU(IN , GA)SE2; METAL TARGET; METALLIC CRYSTALS; METALLIC TARGETS; POWER CONVERSION EFFICIENCIES; REACTIVE SPUTTERING PROCESS; SUB-MICRON THIN FILMS; SUBMICRON;

CONVERSION EFFICIENCY; COPPER; COPPER COMPOUNDS; FILM GROWTH; GALLIUM; REACTIVE SPUTTERING; SELENIUM COMPOUNDS; SOLAR CELLS; SURFACE ROUGHNESS; THIN FILMS; VAPOR DEPOSITION;

SEMICONDUCTING SELENIUM COMPOUNDS;

EID: 84867873454     PISSN: 10627995     EISSN: 1099159X     Source Type: Journal    
DOI: 10.1002/pip.1202     Document Type: Article

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