Reactive magnetron co-sputtering of Cu(In,Ga)Se2absorber layers by a 2-stage process: Role of substrate type and Na-doping

Thin Solid Films

Volumn 582, Issue , 2015, Pages 95-99

  Schulte, Jonas ^a   Harbauer, Karsten ^a   Ellmer, Klaus ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Reactive magnetron sputtering; Cu(In,Ga)Se2solar cells; Multi stage processes; Na doping Re evaporation of indium

Indexed keywords

BINARY ALLOYS; COPPER ALLOYS; COPPER COMPOUNDS; EFFICIENCY; EVAPORATION; FILM PREPARATION; GALLIUM ALLOYS; MAGNETRON SPUTTERING; MOLYBDENUM COMPOUNDS; OPEN CIRCUIT VOLTAGE; SEMICONDUCTOR DOPING; SODIUM COMPOUNDS; SOLAR CELLS; SPUTTER DEPOSITION; SUBSTRATES;

DEPOSITION STAGES; MULTISTAGE PROCESS; NA DOPING; REACTIVE MAGNETRON CO-SPUTTERING; REACTIVE MAGNETRON SPUTTERING; SOLAR CELL EFFICIENCIES; SOLAR CELL MANUFACTURING; SUBSTRATE TEMPERATURE;

FLUORINE COMPOUNDS;

EID: 84926528463     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2014.10.089     Document Type: Conference Paper

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