Toward an uncertainty budget for measuring nanoparticles by AFM

Metrologia

Volumn 53, Issue 1, 2015, Pages 41-50

  Delvallee A ^a,b   Feltin, N ^a   Ducourtieux, S ^a   Trabelsi, M ^a   Hochepied, J F ^b  

^a LABORATOIRE NATIONAL DE MÉTROLOGIE ET D ESSAIS LNE   (France)

^b ENSTA PARISTECH   (France)

Author keywords

AFM; nanoparticles; size distribution; uncertainty budget

Indexed keywords

ATOMIC FORCE MICROSCOPY; BUDGET CONTROL; MICA; NANOPARTICLES; SILICATE MINERALS; SIZE DISTRIBUTION;

CALIBRATION PROCESS; HEIGHT DISTRIBUTION; MAIN ERROR SOURCES; MEASURING METHOD; METROLOGICAL CHARACTERIZATION; SCANNING SPEED; SUBSTRATE ROUGHNESS; UNCERTAINTY BUDGET;

UNCERTAINTY ANALYSIS;

EID: 84957542845     PISSN: 00261394     EISSN: 16817575     Source Type: Journal    
DOI: 10.1088/0026-1394/53/1/41     Document Type: Article

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