Direct comparison of AFM and SEM measurements on the same set of nanoparticles

Measurement Science and Technology

Volumn 26, Issue 8, 2015, Pages

  Delvallee A ^a,b   Feltin, N ^a   Ducourtieux, S ^a   Trabelsi, M ^a   Hochepied, J F ^b  

^a LABORATOIRE NATIONAL DE MÉTROLOGIE ET D ESSAIS LNE   (France)

^b ENSTA PARISTECH   (France)

Author keywords

AFM; nanoparticles; nanoparticles deposition; sampling; SEM; size distribution

Indexed keywords

DEPOSITION; MICA; SAMPLING; SCANNING ELECTRON MICROSCOPY; SILICATE MINERALS; SILICON OXIDES; SIZE DISTRIBUTION;

AFM; CONTROL INTERFACES; DEPOSITION CONDITIONS; GOLD NANOPARTICLES; HYBRID METROLOGIES; SAMPLING METHOD; SEMI-AUTOMATICS; SILICON SUBSTRATES;

NANOPARTICLES;

EID: 84940106243     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/26/8/085601     Document Type: Article

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