Creep-resistant nanocrystalline gold-vanadium alloyed microcorrugated diaphragms (MCDS)

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Volumn , Issue , 2015, Pages 888-891

  Li, Jin ^a,b   Yang, Zhengan ^b   Psychogiou, Dimitra ^b   Sinanis, Michael D ^b   Peroulis, Dimitrios ^b  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b Purdue University   (United States)

Author keywords

Annealing; co sputtering; creep resistant; gold vanadium; grain size; microcorrugated diaphragm; nanocrystalline; RF MEMS; stress relaxation

Indexed keywords

ACTUATORS; ANNEALING; CREEP; CREEP RESISTANCE; DIAPHRAGMS; GRAIN SIZE AND SHAPE; MICROSYSTEMS; NANOCRYSTALS; SOLID-STATE SENSORS; STRESS RELAXATION; TRANSDUCERS;

COSPUTTERING; CREEP RESISTANT; GRAIN SIZE; NANOCRYSTALLINES; RF-MEMS;

GOLD;

EID: 84955503805     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2015.7181066     Document Type: Conference Paper

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