High-Q MEMS-tunable W-band bandstop resonators

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2014, Pages

  Naglich, Eric J ^a   Sinani, Mihal ^a   Moon, Sungwook ^a   Peroulis, Dimitrios ^a  

^a Purdue University   (United States)

Author keywords

Cavity resonators; Filters; Resonator filters; Tunable circuits and devices

Indexed keywords

CAVITY RESONATORS; FILTERS (FOR FLUIDS); MICROWAVE FILTERS;

BANDSTOP RESONATORS; HIGH QUALITY FACTORS; INTEGRATED CIRCUIT MANUFACTURING; LOWER FREQUENCIES; RESONATOR FILTERS; SILICON MICROFABRICATION; TUNABLE CIRCUITS AND DEVICES; TUNING VOLTAGES;

TUNING;

EID: 84905038374     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2014.6848511     Document Type: Conference Paper

References (6)

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3. M. S. Arif and D. Peroulis, "All-Silicon Technology for High-Q Evanescent Mode Cavity Tunable Resonators and Filters," Journal of Microelectromechanical Systems, to appear.
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