Creep-resistant aluminum alloys for use in MEMS

Journal of Micromechanics and Microengineering

Volumn 15, Issue 7, 2005, Pages

  Modlinski, R ^a,b   Ratchev, P ^a   Witvrouw, A ^a   Puers, R ^b   De Wolf, I ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; CHEMICAL MODIFICATION; CHEMICAL RELAXATION; CREEP; HIGH TEMPERATURE EFFECTS; PRECIPITATION (CHEMICAL); STRESS ANALYSIS; SUBSTRATES; TENSILE STRENGTH;

CREEP PARAMETERS; CREEP RATE; CREEP RESISTANCE; CURVATURE MEASUREMENTS;

MICROELECTROMECHANICAL DEVICES;

EID: 21044437428     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/7/023     Document Type: Article

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