Laterally Ordered Sub-10 nm Features Obtained from Directed Self-Assembly of Si-Containing Block Copolymer Thin Films

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Volumn 11, Issue 48, 2015, Pages 6377-6383

  Rho, Yecheol ^a   Aissou, Karim ^a   Mumtaz, Muhammad ^a,b   Kwon, Wonsang ^a   Pécastaings, Gilles ^a   Mocuta, Cristian ^c   Stanecu, Stefan ^c   Cloutet, Eric ^a   Brochon, Cyril ^a   Fleury, Guillaume ^a   Hadziioannou, Georges ^a  

^a UNIVERSITÉ DE BORDEAUX   (France)

^b ARKEMA   (France)

^c SYNCHROTRON SOLEIL   (France)

Author keywords

block copolymers; directed self assembly; lateral order; moir patterns; sinusoidal templates

Indexed keywords

BLOCK COPOLYMERS; ESTERS; THIN FILMS;

BLOCK COPOLYMER THIN FILMS; DIRECTED SELF-ASSEMBLY; LARGE-GRAIN; LATERAL ORDERING; OUT-OF PLANE; SILACYCLOBUTANE; SINUSOIDAL SURFACES; SINUSOIDAL TEMPLATES;

SELF ASSEMBLY;

EID: 84955216912     PISSN: 16136810     EISSN: 16136829     Source Type: Journal    
DOI: 10.1002/smll.201500439     Document Type: Article

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