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Volumn 2001-January, Issue , 2001, Pages 483-488

Porous silicon as multifunctional material in MEMS

Author keywords

MEMS; Micromachining; Microsystems; Porous silicon

Indexed keywords

CHARACTERIZATION; COMPOSITE MICROMECHANICS; MEMS; MICROMACHINING; MICROSYSTEMS; NANOTECHNOLOGY; PORE SIZE; SILICON; SURFACE MICROMACHINING;

EID: 84949199762     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2001.966470     Document Type: Conference Paper
Times cited : (8)

References (17)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.