Modeling and fabrication of single cantilever piezoelectric microgenerator with optimized Zno active layer

Thin Solid Films

Volumn 591, Issue , 2015, Pages 305-310

  Prusakova L ^a   Novak P ^a   Kulha, P ^b   Ocenasek J ^a   Savkova J ^a   Pastorek, L ^a   Sutta P ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

^b CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

Author keywords

Energy harvesting; Generated voltage; Piezo electric microgenerator; Zinc oxide

Indexed keywords

ALUMINA; ALUMINUM OXIDE; CRYSTALLITE SIZE; DEPOSITION RATES; ENERGY HARVESTING; FABRICATION; FILM PREPARATION; II-VI SEMICONDUCTORS; ION BOMBARDMENT; MICROSTRUCTURE; NANOCANTILEVERS; NATURAL FREQUENCIES; OPEN CIRCUIT VOLTAGE; OXIDE MINERALS; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; SCANNING ELECTRON MICROSCOPY; SUBSTRATES;

DIRECT CURRENT MAGNETRON SPUTTERING; DISRUPTIVE EFFECTS; FABRICATION PROCESS; GEOMETRICAL ARRANGEMENTS; MICROGENERATORS; MULTI-LAYER SYSTEM; PIEZOELECTRIC GENERATORS; ZNO MICROSTRUCTURES;

ZINC OXIDE;

EID: 84942838059     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2015.05.053     Document Type: Conference Paper

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