Precise control of defects in graphene using oxygen plasma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 33, Issue 6, 2015, Pages

  Lee, Geonyeop ^a   Kim, Jihyun ^a   Kim, Kyeounghak ^b   Han, Jeong Woo ^b  

^a Korea University   (South Korea)

^b University of Seoul   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECT DENSITY; DEFECTS; DENSITY FUNCTIONAL THEORY; OXYGEN; REACTIVE ION ETCHING;

DEFECT ENGINEERING; DEFECT FORMATION; FACILE METHOD; MECHANISM OF DEFECT FORMATIONS; OXYGEN FLOW RATES; OXYGEN PLASMAS; POWER CONDITIONS; PRECISE CONTROL;

GRAPHENE;

EID: 84936862413     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.4926378     Document Type: Article

References (36)

1. K. S. Novoselov, V. I. Falko, L. Colombo, P. R. Gellert, M. G. Schwab, and K. Kim, Nature 490, 192 (2012). 10.1038/nature11458
2. A. K. Geim and K. S. Novoselov, Nat. Mater. 6, 183 (2007). 10.1038/nmat1849
3. Y. Zhu, S. Murali, W. Cai, X. Li, J. W. Suk, J. R. Potts, and R. S. Ruoff, Adv. Mater. 22, 3906 (2010). 10.1002/adma.201001068
4. H. Raza, Graphene Nanoelectronics: Metrology, Synthesis, Properties and Applications (Springer, Berlin, 2012).
5. H. Liu, Y. Liu, and D. Zhu, J. Mater. Chem. 21, 3335 (2011). 10.1039/C0JM02922J
6. L. Tapaszto, G. Dobrik, P. Lambin, and L. P. Biro, Nat. Nanotechnol. 3, 397 (2008). 10.1038/nnano.2008.149
7. S. Nakaharai, T. Iijima, S. Ogawa, S. Suzuki, S.-L. Li, K. Tsukagoshi, S. Sato, and N. Yokoyama, ACS Nano 7, 5694 (2013). 10.1021/nn401992q
8. P. T. Araujo, M. Terrones, and M. S. Dresselhaus, Mater. Today 15, 98 (2012). 10.1016/S1369-7021(12)70045-7
9. A. Pirkle et al., Appl. Phys. Lett. 99, 122108 (2011). 10.1063/1.3643444
10. D. J. Appelhans, Z. Lin, and M. T. Lusk, Phys. Rev. B 82, 073410 (2010). 10.1103/PhysRevB.82.073410
11. K. Kim, H. Kang, C. Y. Lee, and W. S. Yun, J. Vac. Sci. Technol. B 31, 030602 (2013). 10.1116/1.4798649
12. A. Zandiatashbar et al., Nat. Commun. 5, 3186 (2014). 10.1038/ncomms4186
13. O. V. Yazyev and L. Helm, Phys. Rev. B 75, 125408 (2007). 10.1103/PhysRevB.75.125408
14. L. G. Cançado et al., Nano Lett. 11, 3190 (2011). 10.1021/nl201432g
15. D. C. Kim, D.-Y. Jeon, H.-J. Chung, Y. Woo, J. K. Shin, and S. Seo, Nanotechnology 20, 375703 (2009). 10.1088/0957-4484/20/37/375703
16. D. Teweldebrhan and A. A. Balandin, Appl. Phys. Lett. 94, 013101 (2009). 10.1063/1.3062851
17. H. Tao, J. Moser, F. Alzina, Q. Wang, and C. M. Sotomayor-Torres, J. Phys. Chem. C 115, 18257 (2011). 10.1021/jp2050756
18. R. Larciprete, S. Fabris, T. Sun, P. Lacovig, A. Baraldi, and S. Lizzit, J. Am. Chem. Soc. 133, 17315 (2011). 10.1021/ja205168x
19. Z. Li, W. Zhang, Y. Luo, J. Yang, and J. G. Hou, J. Am. Chem. Soc. 131, 6320 (2009). 10.1021/ja8094729
20. Y. Yamada et al., J. Am. Chem. Soc. 136, 2232 (2014). 10.1021/ja4117268
21. G. Kresse and J. Furthmüller, Phys. Rev. B 54, 11169 (1996). 10.1103/PhysRevB.54.11169
22. D. Sholl and J. A. Steckel, Density Functional Theory: A Practical Introduction (Wiley, New York, 2009).
23. J. P. Perdew, K. Burke, and M. Ernzerhof, Phys. Rev. Lett. 77, 3865 (1996). 10.1103/PhysRevLett.77.3865
24. H. J. Monkhorst and J. D. Pack, Phys. Rev. B 13, 5188 (1976). 10.1103/PhysRevB.13.5188
25. S. Grimme, J. Comput. Chem. 27, 1787 (2006). 10.1002/jcc.20495
26. A. C. Ferrari and D. M. Basko, Nat. Nanotechnol. 8, 235 (2013). 10.1038/nnano.2013.46
27. C. N. R. Rao and A. K. Sood, Graphene: Synthesis, Properties, and Phenomena (Wiley, New York, 2013).
28. A. C. Ferrari and J. Robertson, Phys. Rev. B 64, 075414 (2001). 10.1103/PhysRevB.64.075414
29. A. Eckmann, A. Felten, A. Mishchenko, L. Britnell, R. Krupke, K. S. Novoselov, and C. Casiraghi, Nano Lett. 12, 3925 (2012). 10.1021/nl300901a
30. J. Jiang, R. Pachter, F. Mehmood, A. E. Islam, B. Maruyama, and J. J. Boeckl, Carbon 90, 53 (2015). 10.1016/j.carbon.2015.03.049
31. P. A. Thrower and R. M. Mayer, Phys. Status Solid A 47, 11 (1978). 10.1002/pssa.2210470102
32. S. Ranber and K. Peter, J. Phys. Condens. Matter 21, 196002 (2009). 10.1088/0953-8984/21/19/196002
33. A. J. Pak, E. Paek, and G. S. Hwang, Carbon 68, 734 (2014). 10.1016/j.carbon.2013.11.057
34. G. Yang, B.-J. Kim, K. Kim, J. W. Han, and J. Kim, RSC Adv. 5, 31861 (2015). 10.1039/C5RA03551A
35. L. Sun, F. Banhart, and J. Warner, MRS Bull. 40, 29 (2015). 10.1557/mrs.2014.303
36. P. V. Kumar, M. Bernardi, and J. C. Grossman, ACS Nano 7, 1638 (2013). 10.1021/nn305507p