Novel NIR camera with extended sensitivity and low noise for photon emission microscopy of VLSI circuits

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn 2014-January, Issue January, 2014, Pages 6-11

  Shehata, Andrea Bahgat ^a   Stellari, Franco ^a   Weger, Alan ^a   Song, Peilin ^a   Deslandes, Herve ^b   Lundquist, Ted ^b   Ramsay, Euan ^b  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b DCG SYSTEMS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; FAILURE ANALYSIS; PHOTONS;

CIRCUIT UNDER TEST; EMISSION IMAGES; INTRINSIC EMISSION; NORMAL OPERATIONS; PHOTON EMISSION MICROSCOPY; SIGNAL INTENSITIES; STATE OF THE ART; SUPPLY VOLTAGES;

VLSI CIRCUITS;

EID: 84932168204     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. F. Stellari et al., "Testing and diagnostics of CMOS circuits using Light Emission from Off-State Leakage Current", IEEE Trans, on Electron Dev., Vol. 51, no. 9, 2004, pp. 1455-1462.
2. S. Polonsky et al., "Photon emission microscopy of inter/intra chip device performance variations", ESREF, 2005, pp. 1471-1475.
3. S. Rusu et al., "Backside infrared probing for static voltage drop and dynamic timing measurements", ISSCC, 2001, pp. 276-277.
4. P. Song et al., "MARVEL - Malicious Alteration Recognitionn and Verification by Emission of Light", HOST, 2011, pp. 117-121.
5. A. Tosi et al., "Hot-carrier photoemission in scaled CMOS technologies: a challenge for emission based testing and diagnostics", IRPS, 2006, pp. 595-601.
6. U. Kindereit et al., "Near-infrared photon emission spectroscopy trends in scaled SOI technologies", ISTFA, 2012, pp. 128-134.
7. N. Khurana et al, U.S. Patent 6825978.