Modeling and experiments of self-reflectivity under femtosecond ablation conditions

Journal of the Optical Society of America B: Optical Physics

Volumn 32, Issue 4, 2015, Pages 606-616

  Zhang, Hao ^a   Wolbers, S A ^a   Krol, D M ^a,b   Dijkhuis, J I ^a   Van Oosten, D ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; FINITE DIFFERENCE TIME DOMAIN METHOD; LASER ABLATION; LASER PULSES; MAXWELL EQUATIONS; OPTICAL PROPERTIES; REFLECTION; ULTRAFAST LASERS;

FEMTOSECOND ABLATION; FOCUSED FEMTOSECOND LASERS; MAXWELL'S EQUATIONS;

ULTRASHORT PULSES;

EID: 84926483500     PISSN: 07403224     EISSN: 15208540     Source Type: Journal    
DOI: 10.1364/JOSAB.32.000606     Document Type: Article

References (35)

1. E. G. Gamaly, S. Juodkazis, K. Nishimura, H. Misawa, B. Luther-Davies, L. Hallo, Ph. Nicolai, and V. T. Tikhonchuk, "Lasermatter interaction in the bulk of a transparent solid: Confined microexplosion and void formation," Phys. Rev. B 73, 214101 (2006).
2. Y. Liao, Y. Shen, L. Qiao, D. Chen, Y. Cheng, K. Sugioka, and K. Midorikawa, "Femtosecond laser nanostructuring in porous glass," Opt. Lett. 38, 187-189 (2013).
3. H. Zhang, D. van Oosten, D. M. Krol, and J. I. Dijkhuis, "Saturation effects in femtosecond laser ablation of silicon-on-insulator," Appl. Phys. Lett. 99, 231108 (2011).
4. M. Li, K. Mori, M. Ishizuka, X. Liu, Y. Sugimoto, N. Ikeda, and K. Asakawa, "Photonic bandpass filter for 1550 nm fabricated by femtosecond direct laser ablation," Appl. Phys. Lett. 83, 216-218 (2003).
5. B. Rethfeld, K. Sokolowski-Tinten, D. Von Der Linde, and S. I. Anisimov, "Timescales in the response of materials to femtosecond laser excitation," Appl. Phys. A 79, 767-773 (2004).
6. D. Hulin, M. Combescot, J. Bok, A. Migus, J. Y. Vinet, and A. Antonetti, "Energy transfer during silicon irradiation by femtosecond laser pulse," Phys. Rev. Lett. 52, 1998-2001 (1984).
7. K. Sokolowski-Tinten and D. von der Linde, "Generation of dense electron-hole plasmas in silicon," Phys. Rev. B 61, 2643-2650 (2000).
8. K. Sokolowski-Tinten, J. Bialkowski, and D. von der Linde, "Ultrafast laser-induced order-disorder transitions in semiconductors," Phys. Rev. B 51, 14186-14198 (1995).
9. R. W. Boyd, Nonlinear Optics 3rd ed. (Academic, 2008).
10. Th. Brabec and F. Krausz, "Nonlinear optical pulse propagation in the single-cycle regime," Phys. Rev. Lett. 78, 3282-3285 (1997).
11. H. Zhang, D. M. Krol, J. I. Dijkhuis, and D. van Oosten, "Self-scattering effects in femtosecond laser nanoablation," Opt. Lett. 38, 5032-5035 (2013).
12. L. Hallo, A. Bourgeade, V. T. Tikhonchuk, C. Mezel, and J. Breil, "Model and numerical simulations of the propagation and absorption of a short laser pulse in a transparent dielectric material: Blast-wave launch and cavity formation," Phys. Rev. B 76, 024101 (2007).
13. C. Mézel, L. Hallo, A. Bourgeade, D. Hébert, V. T. Tikhonchuk, B. Chimier, B. Nkonga, G. Schurtz, and G. Travaillé, "Formation of nanocavities in dielectrics: a self-consistent modeling," Phys. Plasmas 15, 093504 (2008).
14. I. B. Bogatyrev, D. Grojo, P. Delaporte, S. Leyder, M. Sentis, W. Marine, and T. E. Itina, "Non-linear absorption of 1.3-μm wavelength femtosecond laser pulses focused inside semiconductors: finite difference time domain-two temperature model combined computational study," J. Appl. Phys. 110, 103106 (2011).
15. H. Schmitz and V. Mezentsev, "Full-vectorial modeling of femtosecond pulses for laser inscription of photonic structures," J. Opt. Soc. Am. B 29, 1208-1217 (2012).
16. T. Y. Choi and C. P. Grigoropoulos, "Plasma and ablation dynamics in ultrafast laser processing of crystalline silicon," J. Appl. Phys. 92, 4918-4925 (2002).
17. P. P. Pronko, P. A. VanRompay, C. Horvath, F. Loesel, T. Juhasz, X. Liu, and G. Mourou, "Avalanche ionization and dielectric breakdown in silicon with ultrafast laser pulses," Phys. Rev. B 58, 2387-2390 (1998).
18. N. Medvedev and B. Rethfeld, "A comprehensive model for the ultrashort visible light irradiation of semiconductors," J. Appl. Phys. 108, 103112 (2010).
19. E. Yablonovitch and N. Bloembergen, "Avalanche ionization and the limiting diameter of filaments induced by light pulses in transparent media," Phys. Rev. Lett. 29, 907-910 (1972).
20. B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Nanosecond-to-femtosecond laser-induced breakdown in dielectrics," Phys. Rev. B 53, 1749-1761 (1996).
21. H. M. van Driel, "Kinetics of high-density plasmas generated in Si by 1.06- and 0.53-μm picosecond laser pulses," Phys. Rev. B 35, 8166-8176 (1987).
22. N. W. Ashcroft and N. D. Mermin, Solid State Physics (Brooks/ Cole, 1976).
23. D. M. Riffe, "Temperature dependence of silicon carrier effective masses with application to femtosecond reflectivity measurements," J. Opt. Soc. Am. B 19, 1092-1100 (2002).
24. C. Fourment, F. Deneuville, D. Descamps, F. Dorchies, S. Petit, O. Peyrusse, B. Holst, and V. Recoules, "Experimental determination of temperature-dependent electron-electron collision frequency in isochorically heated warm dense gold," Phys. Rev. B 89, 161110 (2014).
25. E. Bevillon, J. P. Colombier, V. Recoules, and R. Stoian, "Free-electron properties of metals under ultrafast laser-induced electron-phonon nonequilibrium: a first-principles study," Phys. Rev. B 89, 115117 (2014).
26. Z. Lin, L. V. Zhigilei, and V. Celli, "Electron-phonon coupling and electron heat capacity of metals under conditions of strong electron-phonon nonequilibrium," Phys. Rev. B 77, 075133 (2008). Updated calculations at http://www.faculty.virginia.edu/CompMat/electron-phonon-coupling/.
27. K. Eidmann, J. Meyerter-Vehn, T. Schlegel, and S. Huller, "Hydrodynamic simulation of subpicosecond laser interaction with solid-density matter," Phys. Rev. E 62, 1202-1214 (2000).
28. D. M. Sullivan, "Electromagnetic simulation using the FDTD method," IEEE, 2000.
29. A. D. Bristow, N. Rotenberg, and H. M. Van Driel, "Two-photon absorption and Kerr coefficients of silicon for 850-2200 nm," Appl. Phys. Lett. 90, 191104 (2007).
30. B. Y. Mueller and B. Rethfeld, "Relaxation dynamics in laser-excited metals under nonequilibrium conditions," Phys. Rev. B 87, 035139 (2013).
31. S. J. Youn, T. H. Rho, B. I. Min, and K. S. Kim, "Extended Drude model analysis of noble metals," Phys. Status Solidi B 244, 1354-1362 (2007).
32. K. Vestentoft and P. Balling, "Formation of an extended nano-structured metal surface by ultra-short laser pulses: single-pulse ablation in the high-fluence limit," Appl. Phys. A 84, 207-213 (2006).
33. M. Born and E. Wolf, Principles of Optics (Cambridge University, 1999).
34. Lumerical Solutions, Inc. http://www.lumerical.com/tcad-products/fdtd/.
35. L. Novotny and B. Hecht, Nano Optics (Cambridge University, 2006).