Moisture barrier evaluation of SiOx/SiNx stacks on polyimide substrates using electrical calcium test

Thin Solid Films

Volumn 580, Issue , 2015, Pages 101-105

  Zhang, Shiyu ^a   Xue, Wei ^a   Yu, Zhinong ^a  

^a BEIJING INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Plasma enhanced chemical vapor deposition; Polyimide; Silicon nitride; Silicon oxide; Water vapor transmission rate

Indexed keywords

FLEXIBLE ELECTRONICS; MOISTURE; NITRIDES; OXIDE FILMS; PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYIMIDES; SILICON NITRIDE; SILICON OXIDES; STRUCTURAL OPTIMIZATION; SUBSTRATES; TRANSMISSIONS; WATER VAPOR;

BARRIER STRUCTURES; COMPRESSIVE MODE; ELECTRONICS APPLICATIONS; MOISTURE BARRIERS; MOISTURE RESISTANCE; POLYIMIDE SUBSTRATE; STRESS COMPENSATION; WATER VAPOR TRANSMISSION RATE;

CALCIUM;

EID: 84926186415     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2015.02.023     Document Type: Article

References (24)

1. J.S. Park, T.W. Kim, D. Stryakhilev, J.S. Lee, S.G. An, Y.S. Pyo, D.B. Lee, Y.G. Mo, D.U. Jin, and H.K. Chung Flexible full color organic light-emitting diode display on polyimide plastic substrate driven by amorphous indium gallium zinc oxide thin-film transistors Appl. Phys. Lett. 95 2009 013503
2. A.S. Da Silva Sobrinho, G. Czeremuszkin, M. Latreche, and M.R. Wertheimer Defect-permeation correlation for ultrathin transparent barrier coatings on polymers J. Vac. Sci. Technol. A 18 2000 149
3. A.B. Chwang, M.A. Rothman, S.Y. Mao, R.H. Hewitt, M.S. Weaver, J.A. Silvernail, K. Rajan, M. Hack, J.J. Brown, X. Chu, L. Moro, T. Krajewski, and N. Rutherford Thin film encapsulated flexible organic electroluminescent displays Appl. Phys. Lett. 83 2003 413
4. J. Ahmad, K. Bazaka, L.J. Anderson, R.D. White, and M.V. Jacob Materials and methods for encapsulation of OPV: a review Renew. Sust. Energ. Rev. 27 2013 104
5. A.A. Dameron, S.D. Davidson, B.B. Burton, P.F. Carcia, R.S. McLean, and S.M. George Gas diffusion barriers on polymers using multilayers fabricated by Al2O3 and rapid SiO2 atomic layer deposition J. Phys. Chem. C 112 2008 4573
6. M.S. Weaver, L.A. Michalski, K. Rajan, M.A. Rothman, J.A. Silvernail, J.J. Brown, P.E. Burrows, G.L. Graff, M.E. Gross, P.M. Martin, M. Hall, E. Mast, C. Bonham, W. Bennett, and M. Zumhoff Organic light-emitting devices with extended operating lifetimes on plastic substrates Appl. Phys. Lett. 81 2002 2929
7. M.O. Reese, A.A. Dameron, and M.D. Kempe Quantitative calcium resistivity based method for accurate and scalable water vapor transmission rate measurement Rev. Sci. Instrum. 82 2011 085101
8. A. Ranade, N.A. D'Souza, R.M. Wallace, and B.E. Gnade High sensitivity gas permeability measurement system for thin plastic films Rev. Sci. Instrum. 76 2005 013902
9. P.J. Brewer, B.A. Goody, Y. Kumar, and M.J.T. Milton Accurate measurements of water vapor transmission through high-performance barrier layers Rev. Sci. Instrum. 83 2012 075118
10. R.S. Kumar, M. Auch, E. Ou, G. Ewald, and C.S. Jin Low moisture permeation measurement through polymer substrates for organic light emitting devices Thin Solid Films 417 2002 120
11. P.F. Carcia, R.S. McLean, M.H. Reilly, M.D. Groner, and S.M. George Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers Appl. Phys. Lett. 89 2006 031915
12. R. Paetzold, A. Winnacker, D. Henseler, V. Cesari, and K. Heuser Permeation rate measurements by electrical analysis of calcium corrosion Rev. Sci. Instrum. 74 2003 5147
13. J.H. Choi, Y.M. Kim, Y.W. Park, J.W. Huh, B.K. Ju, I.S. Kim, and H.N. Hwang Evaluation of gas permeation barrier properties using electrical measurements of calcium degradation Rev. Sci. Instrum. 78 2007 064701
14. T. Chen, D. Wuu, C. Wu, C. Chiang, Y. Chen, and R. Horng High-performance transparent barrier films of SiOx/SiNx stacks on flexible polymer substrates J. Electrochem. Soc. 153 2006 F244
15. G. Dennler, C. Lungenschmied, H. Neugebauer, N.S. Sariciftci, M. Latrèche, G. Czeremuszkin, and M.R. Wertheimer A new encapsulation solution for flexible organic solar cells Thin Solid Films 511-512 2006 349
16. V. Gottschalch, R. Schmidt, B. Rheinländer, D. Pudis, S. Hardt, J. Kvietkova, G. Wagner, and R. Franzheld Plasma-enhanced chemical vapor deposition of SiOx/SiNx Bragg reflectors Thin Solid Films 416 2002 224
17. D.A. Nissen The low-temperature oxidation of calcium by water vapor Oxid. Met. 11 1977 241
18. S. Cros, M. Firon, S. Lenfant, P. Trouslard, and L. Beck Study of thin calcium electrode degradation by ion beam analysis Nucl. Inst. Methods Phys. Res. B 251 2006 257
19. M.D. Kempe, M.O. Reese, and A.A. Dameron Evaluation of the sensitivity limits of water vapor transmission rate measurements using electrical calcium test Rev. Sci. Instrum. 84 2013 025109
20. G.L. Graff, R.E. Williford, and P.E. Burrows Mechanisms of vapor permeation through multilayer barrier films: lag time versus equilibrium permeation J. Appl. Phys. 96 2004 1840
21. G.K. van der Wel, and O.C.G. Adan Moisture in organic coatings - a review Prog. Org. Coat. 37 1999 1
22. D.S. Wuu, T.N. Chen, C.C. Wu, C.C. Chiang, Y.P. Chen, R.H. Horng, and F.S. Juang Transparent barrier coatings for flexible organic light-emitting diode applications Chem. Vap. Depos. 12 2006 220
23. A.G. Erlat, R.J. Spontak, R.P. Clarke, T.C. Robinson, P.D. Haaland, Y. Tropsha, N.G. Harvey, and E.A. Vogler SiOx gas barrier coatings on polymer substrates: morphology and gas transport considerations J. Phys. Chem. B 103 1999 6047
24. J.S. Lewis, and M.S. Weaver Thin-film permeation-barrier technology for flexible organic light-emitting devices IEEE J. Sel. Top. Quantum Electron. 10 2004 45