Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system

Surface and Coatings Technology

Volumn 267, Issue , 2015, Pages 53-58

  Vergöhl, Michael ^a   Bruns, Stefan ^a   Rademacher, Daniel ^a   Bräuer, Günter ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Antireflective coating; CARS process; Cylindrical magnetron; High precision optical filters; Magnetron sputtering; Uniformity

Indexed keywords

ANTIREFLECTION COATINGS; AUTOMOBILE MANUFACTURE; COHERENT SCATTERING; FIBER OPTIC SENSORS; LIGHT ABSORPTION; LIGHT INTERFERENCE; MAGNETRON SPUTTERING; REACTIVE SPUTTERING; STABILITY;

ANTI REFLECTIVE COATINGS; CYLINDRICAL MAGNETRON SPUTTERING; HIGH-PRECISION; OPTICAL INTERFERENCE COATINGS; OPTICAL MULTILAYER FILTERS; PLASMA ASSISTED REACTIVE MAGNETRON SPUTTERING; REACTIVE SPUTTERING PROCESS; UNIFORMITY;

OPTICAL MULTILAYERS;

EID: 84925969087     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2015.01.051     Document Type: Article

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