Continuous production of nanostructured particles using spatial atomic layer deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 33, Issue 2, 2015, Pages

  Van Ommen, J Ruud ^a   Kooijman, Dirkjan ^a   Niet, Mark De ^a   Talebi, Mojgan ^a   Goulas, Aristeidis ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; DEPOSITION; NANOCLUSTERS; NANOPARTICLES; PHOTOCATALYSTS; PLATINUM; TITANIUM DIOXIDE;

CONTINUOUS PRODUCTION; CORE-SHELL NANOPARTICLES; MICRON-SIZED PARTICLES; NANOPARTICLE AGGLOMERATES; NANOSTRUCTURED PARTICLES; NANOSTRUCTURED POWDERS; PHOTOCATALYTIC ACTIVITIES; UNIFORM DISTRIBUTION;

ATOMIC LAYER DEPOSITION;

EID: 84923652238     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.4905725     Document Type: Article

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