Characterization methods using FIB/SEM dualbeam instrumentation

Focused Ion Beam Systems: Basics and Applications

Volumn 9780521831994, Issue , 2007, Pages 126-145

  Reyntjens, Steve ^a   Giannuzzi, Lucille A ^a  

^a Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3D CHARACTERIZATION; BULK SUBSTRATES; CHARACTERIZATION METHODS; CRYSTALLOGRAPHIC DATA; ELECTRON BACK SCATTER DIFFRACTION; ELEMENTAL MAPS; ENERGY DISPERSIVE SPECTROMETRY; SERIAL SECTION;

CHARACTERIZATION;

EID: 84923644182     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1017/CBO9780511600302.006     Document Type: Chapter

References (8)

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2. P. G. Kotula, M. R. Keenan and J. R. Michael. Microsc. Microanal., 9, Suppl. 2, (2003), 1004-15.
3. S. Reyntjens. Dualbeam (FIB/SEM) sample preparation for sub-micrometer EBSD analysis. Presented at Advances in Focused Ion Beam Microscopy: FIB 2003, Cambridge, UK (2003).
4. M. K. Miller, K. F. Russell and G. B. Thompson. Ultramicroscopy, 102 (2005), 287-98.
5. J. J. L. Mulders and A. P. Day. Three-dimensional texture analysis. Proc. ICOTOM 14, Leuven, Belgium (2005), 237-42.
6. J. J. L. Mulders and H. L. Frazer. Microsc. Microanal., 11, Suppl. 2 (2005), 506-7.
7. L. A. Giannuzzi, F. A. Stevie, eds., Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice (Berlin: Springer, 2005), pp. 201-28
8. L. A. Giannuzzi. Scanning, 27 (2006), 165-9.