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Volumn 27, Issue 4, 2005, Pages 165-169
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Particle-induced x-ray analysis using focused ion beams
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Author keywords
Focused ion beam; Focused ion beam induced x ray; Particle induced x ray emission; X ray; X ray energy dispersive spectroscopy
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Indexed keywords
ELECTRONS;
IONS;
PROTONS;
SCANNING ELECTRON MICROSCOPY;
SENSITIVITY ANALYSIS;
SPECTRUM ANALYSIS;
X RAY ANALYSIS;
BOMBARDMENT;
X-RAY EMISSION;
X-RAY SPECTRA;
ION BEAMS;
ARTICLE;
ELECTRON TRANSPORT;
ION TRANSPORT;
MOLECULAR INTERACTION;
PARTICLE RADIATION;
PRIORITY JOURNAL;
PROTON TRANSPORT;
SCANNING ELECTRON MICROSCOPY;
TECHNIQUE;
X RAY ANALYSIS;
ELECTRONS;
PROTONS;
X RAY ANALYSIS;
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EID: 22944476806
PISSN: 01610457
EISSN: None
Source Type: Journal
DOI: 10.1002/sca.4950270402 Document Type: Article |
Times cited : (12)
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References (8)
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