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Volumn 27, Issue 4, 2005, Pages 165-169

Particle-induced x-ray analysis using focused ion beams

Author keywords

Focused ion beam; Focused ion beam induced x ray; Particle induced x ray emission; X ray; X ray energy dispersive spectroscopy

Indexed keywords

ELECTRONS; IONS; PROTONS; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS; SPECTRUM ANALYSIS; X RAY ANALYSIS;

EID: 22944476806     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950270402     Document Type: Article
Times cited : (12)

References (8)
  • 1
    • 33444467791 scopus 로고
    • Characteristic x-ray production by heavy ion bombardment as a technique for the examination of solid surfaces
    • Cairns JA: Characteristic x-ray production by heavy ion bombardment as a technique for the examination of solid surfaces. Surf Sci 34, 638-648 (1973)
    • (1973) Surf Sci , vol.34 , pp. 638-648
    • Cairns, J.A.1
  • 8
    • 0346728134 scopus 로고    scopus 로고
    • The stopping and range of ions in solids
    • Ziegler JF, Biersack JP: The stopping and range of ions in solids. SRIM 2003.20 (www.srim.org) (2003)
    • (2003) SRIM 2003.20
    • Ziegler, J.F.1    Biersack, J.P.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.