Nanocrystalline ZnO thin film deposition on flexible substrate by low-temperature sputtering process for plastic displays

Journal of Nanoscience and Nanotechnology

Volumn 14, Issue 10, 2014, Pages 7970-7975

  Banerjee, Arghya Narayan ^a   Joo, Sang Woo ^a   Min, Bong Ki ^a  

^a Yeungnam University   (South Korea)

Author keywords

CMOS compatible; Flexible display; Low temperature; Nanocrystalline ZnO; Plastic substrate; Sputter deposition

Indexed keywords

CMOS INTEGRATED CIRCUITS; COST EFFECTIVENESS; DEPOSITION; FABRICATION; FLEXIBLE DISPLAYS; II-VI SEMICONDUCTORS; LIGHT TRANSMISSION; METALLIC FILMS; NANOCRYSTALS; OPTICAL FILMS; OPTICAL PROPERTIES; SOLID STATE DEVICES; SPUTTER DEPOSITION; TEMPERATURE; ZINC OXIDE;

CMOS COMPATIBLE; LOW TEMPERATURES; LOW-TEMPERATURE FABRICATION; MICROSTRUCTURAL ANALYSIS; NANOCRYSTALLINE THIN FILMS; NANOCRYSTALLINE ZNO; PLASTIC SUBSTRATES; STRUCTURAL AND OPTICAL PROPERTIES;

THIN FILMS;

EID: 84922055885     PISSN: 15334880     EISSN: 15334899     Source Type: Journal    
DOI: 10.1166/jnn.2014.9399     Document Type: Article

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