Nanomotor lithography

Nature Communications

Volumn 5, Issue , 2014, Pages

  Li, Jinxing ^a   Gao, Wei ^a   Dong, Renfeng ^a   Pei, Allen ^a   Sattayasamitsathit, Sirilak ^a   Wang, Joseph ^a  

^a UNIVERSITY OF CALIFORNIA SAN DIEGO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOWIRE; NANOMATERIAL;

BIOTRANSFORMATION; DESIGN; LITHOLOGY; MECHANICS; MOVEMENT; TECHNOLOGICAL CHANGE;

ARTICLE; ATOMIC FORCE MICROSCOPY; LIGHT; LIGHT SCATTERING; MAGNETIC FIELD; NANOFABRICATION; NANOMOTOR; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTY; MATERIALS; NANOTECHNOLOGY; PRINTING; PROCEDURES; TRENDS;

LIGHT; MANUFACTURED MATERIALS; NANOSTRUCTURES; NANOTECHNOLOGY; NANOWIRES; PRINTING;

EID: 84919753498     PISSN: None     EISSN: 20411723     Source Type: Journal    
DOI: 10.1038/ncomms6026     Document Type: Article

References (35)

1. Ito, T. & Okazaki, S. Pushing the limits of lithography. Nature 406, 1027-1031 (2000).
2. Service, R. F. Optical lithography goes to extremes-and beyond. Science 293, 785-786 (2001).
3. Madou, M. J. Fundamentals of Microfabrication: the Science of Miniaturization 2nd edn (CRC Press, Boca Raton, FL, USA, 2002).
4. Jeong, H. J. et al. The future of optical lithography. Solid State Technol. 37, 39-47 (1994).
5. Vieu, C. et al. Electron beam lithography: resolution limits and applications. Appl. Surf. Sci. 164, 111-117 (2000).
6. Melngailis, J. Focused ion-beam technology and applications. J. Vac. Sci. Technol. B 5, 469-495 (1987).
7. Piner, R. D., Zhu, J., Xu, F., Hong, S. H. & Mirkin, C. A. "Dip-pen" nanolithography. Science 283, 661-663 (1999).
8. Huo, F. et al. Beam pen lithography. Nat. Nanotechnol. 5, 637-640 (2010).
9. Liao, X. et al. Desktop nanofabrication with massively multiplexed beam pen lithography. Nat. Commun. 4, 2103 (2013).
10. Mcleod, E. & Arnold, C. B. Subwavelength direct-write nanopatterning using optically trapped microspheres. Nat. Nanotechnol. 3, 413-417 (2008).
11. Xia, Y., Rogers, J. A., Paul, K. E. & Whitesides, G. M. Unconventional methods for fabricating and patterning nanostructures. Chem. Rev. 99, 1823-1848 (1999).
12. Barth, J. V., Costantini, G. & Kern, K. Engineering atomic and molecular nanostructures at surfaces. Nature 437, 671-679 (2005).
13. Feng, L. et al. Cinnamate-based DNA photolithography. Nat. Mater. 12, 747-753 (2013).
14. Srituravanich, W. et al. Flying plasmonic lens in the near field for high-speed nanolithography. Nat. Nanotechnol. 3, 733-737 (2008).
15. Pan, L. et al. Maskless plasmonic lithography at 22 nm resolution. Sci. Rep. 1, 175 (2011).
16. Mark, A. G., Gibbs, J. G., Lee, T. C. & Fischer, P. Hybrid nanocolloids with programmed three-dimensional shape and material composition. Nat. Mater. 12, 802-807 (2013).
17. Schliwa, M. & Woehlke, G. Molecular motors. Nature 422, 759-765 (2003).
18. Bath, A. & Turberfield, A. J. DNA nanomachines. Nat. Nanotechnol. 2, 275-284 (2007).
19. Ismagilov, R. F., Schwartz, A., Bowden, N. & Whitesides, G. M. Autonomous movement and self-assembly. Angew. Chem. Int. Ed. 41, 652-654 (2002).
20. Mallouk, T. E. & Sen, A. Powering nanorobots. Sci. Am. 300, 72-77 (2009).
21. Ozin, G. A., Manners, I., Fournier-Bidoz, S. & Arsenault, A. Dream nanomachines. Adv. Mater. 17, 3011-3018 (2005).
22. Wang, J. & Manesh, K. M. Motion control at nanoscale. Small 6, 338-345 (2010).
23. Mei, Y. F., Solovev, A. A., Sanchez, S. & Schmidt, O. G. Rolled-up nanotech on polymers: from basic perception to self-propelled catalytic microengines. Chem. Soc. Rev. 40, 2109-2119 (2011).
24. Loget, G. & Kuhn, A. Electric field-induced chemical locomotion of conducting objects. Nat. Commun. 2, 535 (2011).
25. Wilson, D. A., Nolte, R. J. M. & van Hest, J. C. M. Autonomous movement of platinum-loaded stomatocytes. Nat. Chem. 4, 268-274 (2012).
26. Wang, J. & Gao, W. Nano/microscale motors: biomedical opportunities and challenges. ACS Nano 6, 5745-5751 (2012).
27. Soler, L. et al. Self-propelled micromotors for cleaning polluted water. ACS Nano 7, 9711-9620 (2013).
28. Manesh, K. M. et al. Nanomotor-based biocatalytic patterning of helical metal microstructures. Nanoscale 5, 1310-1314 (2013).
29. Wang, W. et al. Acoustic propulsion of nanorod motors inside living cells. Angew. Chem. Int. Ed. 126, 3265-3268 (2014).
30. Fischer, P. & Ghosh, A. Magnetically actuated propulsion at low Reynolds numbers: towards nanoscale control. Nanoscale 3, 557-563 (2011).
31. Lee, J. Y. et al. Near-field focusing and magnification through self-assembled nanoscale spherical lenses. Nature 460, 498-501 (2009).
32. Dong, L. et al. Adaptive liquid microlenses activated by stimuli-responsive hydrogels. Nature 442, 551-554 (2006).
33. McCloskey, D., Wang, J. J. & Donegan, J. F. Low divergence photonic nanojets from Si3N4 microdisks. Opt. Express 20, 128-140 (2012).
34. Gao, W., Pei, A., Feng, X., Hennessy, C. & Wang, J. Organized self-assembly of Janus micromotors with hydrophobic hemispheres. J. Am. Chem. Soc. 135, 998-1001 (2013).
35. Chen, Q. et al. Supracolloidal reaction kinetics of Janus spheres. Science 331, 199-202 (2011).